Numerical investigation of fluidic micro-oscillators

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 115-117

  Gebhard, U ^a   Hein, H ^a   Schmidt, U ^a  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; NOZZLES;

FLUIDIC MICROOSCILLATORS;

FLUIDIC DEVICES;

EID: 0030092259     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/028     Document Type: Article

References (3)

1. Kirshner J M and Katz S 1975 Design Theory of Fluidic Components (New York: Academic Press)
2. Becker E W, Ehrfeld W, Hagmann P, Maner A and Münchmeyer D 1986 Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, electroforming and plastic moulding (LIGA-Process) Microelectron. Eng. 4 35-56
3. Gebhard U, Hein H, Menz W and Ruther P 1995 Fluidic micro-oscillator to steer a linear tool Proc. Int. Symp. on Microsystems, Intelligent Materials and Robots, MIMR '95 (Sendai, 1995) pp 41-4