On-chip microsystems in silicon: Opportunities and limitations

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 138-143

  Wolffenbuttel, R F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

DATA ACQUISITION; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTOR DEVICE MANUFACTURE;

ONCHIP MICROSYSTEMS;

SILICON SENSORS;

EID: 0030092251     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/034     Document Type: Article

References (22)