Bulk micromachining of Ge for IR gratings

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 46-48

  Lang, W ^b   Leancul, R ^b   Schaber, U ^b   Wiedamann, G ^a   Kaufl H U ^a  

^a EUROPEAN SOUTHERN OBSERVATORY   (Germany)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CHROMIUM; DIFFRACTION GRATINGS; ETCHING; HYDROGEN PEROXIDE; INFRARED DEVICES; MASKS; MICROMACHINING; OPTICAL DEVICES; THIN FILMS;

INFRARED OPTICAL DEVICES;

SEMICONDUCTING GERMANIUM;

EID: 0030091533     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/008     Document Type: Article

References (12)

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