Improvements in TOF-SIMS analysis of organic materials using an indium liquid-metal ion source

American Chemical Society, Polymer Preprints, Division of Polymer Chemistry

Volumn 37, Issue 1, 1996, Pages 839-840

  Bryan, S R ^a   Reich, F ^a  

^a Physical Electronics Inc Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GALLIUM; INDIUM; ION BEAMS; ION BOMBARDMENT; ION SOURCES; POLYETHYLENE TEREPHTHALATES; SECONDARY ION MASS SPECTROMETRY; SPECTRUM ANALYSIS;

LIQUID METAL ION SOURCES (LMIS); TIME OF FLIGHT SECONDARY ION MASS SPECTROMETRY (TOFSIMS);

ORGANIC COMPOUNDS;

EID: 0030091296     PISSN: 00323934     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (5)

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2. L.W. Swanson, Nucl. Instrum. and Meth. in Phys. Res., 218 (1983) 347.
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4. T.Y. Yen, E. Barofsky, and D.F. Barofsky, in Proceedings of the 40th ASMS Conference, (1992) 226.
5. S. Reichlmaier, S.R. Bryan, and D. Briggs, J. Vac. Sci. Technol., A13, (1995) 1217.