Evaluating cleanroom supplies for contamination-free manufacturing

MICRO

Volumn 14, Issue 2, 1996, Pages 39-47

  Wang, Ruiping ^a   Wu, Shun ^a   Williams, Bob ^a   Dyer, Tim ^a   Ramani, Narayanan ^a  

^a Applied Materials ^*

Author keywords

[No Author keywords available]

Indexed keywords

CONTAMINATION; IMPURITIES; MATERIALS TESTING; PARTICLE DETECTORS; PARTICLES (PARTICULATE MATTER); SEMICONDUCTOR DEVICE MANUFACTURE; STATISTICAL METHODS;

CLEANROOM SUPPLIES; CONTAMINATION FREE MANUFACTURING; IONIC CONTAMINATION; LABORATORY TESTING;

CLEAN ROOMS;

EID: 0030086152     PISSN: 10810595     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)