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Volumn 79, Issue 2, 1996, Pages 395-400

A crystalline Si3N4/amorphous Si3N4 composite

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CHEMICAL VAPOR DEPOSITION; CRACK INITIATION; CRYSTALLINE MATERIALS; ELECTRON ENERGY LOSS SPECTROSCOPY; FRACTURE TOUGHNESS; HARDNESS; HEAT TREATMENT; MICROCRACKS; SILICON NITRIDE; THERMAL EFFECTS; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0030086131     PISSN: 00027820     EISSN: None     Source Type: Journal    
DOI: 10.1111/j.1151-2916.1996.tb08134.x     Document Type: Article
Times cited : (5)

References (16)
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    • P. S. Peercy and H. J. Stein, "Post-deposition High-Temperature Processing of Silicon Nitride"; pp. 291-98 in Proceedings of Symposium on Silicon Nitride Thin Insulating Films. Edited by V. J. Kapoor and H. J. Stein. The Electrochemical Society, Pennington, NJ, 1983.
    • (1983) Proceedings of Symposium on Silicon Nitride Thin Insulating Films , pp. 291-298
    • Peercy, P.S.1    Stein, H.J.2
  • 4
    • 0026115117 scopus 로고
    • Microstructural design of toughened ceramics
    • P. F. Becher, "Microstructural Design of Toughened Ceramics," J. Am. Ceram. Soc., 74, 255-69 (1991).
    • (1991) J. Am. Ceram. Soc. , vol.74 , pp. 255-269
    • Becher, P.F.1
  • 6
    • 84987335986 scopus 로고
    • A critical evaluation of indentation techniques for measuring fracture toughness: I, direct crack measurements
    • G. R. Anstis, P. Chantikul, B. R. Lawn, and D. B. Marshall, "A Critical Evaluation of Indentation Techniques for Measuring Fracture Toughness: I, Direct Crack Measurements," J Am. Ceram. Soc., 64 [9] 533-38 (1981).
    • (1981) J Am. Ceram. Soc. , vol.64 , Issue.9 , pp. 533-538
    • Anstis, G.R.1    Chantikul, P.2    Lawn, B.R.3    Marshall, D.B.4
  • 7
    • 0004150613 scopus 로고
    • Reviews in mineralogy
    • Ch. 8. Edited by D. L. Bish and J. E. Post. The Mineralogical Society of America, Washington, D.C.
    • S. A. Howard and K. D. Preston, Reviews in Mineralogy, Vol. 20, Modern Powder Diffraction; Ch. 8. Edited by D. L. Bish and J. E. Post. The Mineralogical Society of America, Washington, D.C., 1989.
    • (1989) Modern Powder Diffraction , vol.20
    • Howard, S.A.1    Preston, K.D.2
  • 9
    • 85033020470 scopus 로고    scopus 로고
    • unpublished results
    • I. E. Reimanis, unpublished results.
    • Reimanis, I.E.1
  • 10
    • 0020941946 scopus 로고
    • Microcracking mechanisms in ceramics
    • Edited by R. C. Bradt, A. G. Evans, D. P. Hasselman, and F. F. Lange. Plenum Press, New York
    • D. J. Green, "Microcracking Mechanisms in Ceramics," pp. 457-78 in Fracture Mechanics of Ceramics, Vol. 5. Edited by R. C. Bradt, A. G. Evans, D. P. Hasselman, and F. F. Lange. Plenum Press, New York, 1983.
    • (1983) Fracture Mechanics of Ceramics , vol.5 , pp. 457-478
    • Green, D.J.1
  • 11
    • 0019047567 scopus 로고
    • Elastic stiffness and thermal expansion coefficients of various refractory suicides and silicon nitride films
    • T. F. Retajczyk and A. K. Sinha, "Elastic Stiffness and Thermal Expansion Coefficients of Various Refractory Suicides and Silicon Nitride Films," Thin Solid Films, 70, 241-47 (1980).
    • (1980) Thin Solid Films , vol.70 , pp. 241-247
    • Retajczyk, T.F.1    Sinha, A.K.2
  • 12
    • 0016484397 scopus 로고
    • Thermal expansion of the nitrides and oxynitrides of silicon in relation to their structures
    • C. M. B. Henderson and D. Taylor, "Thermal Expansion of the Nitrides and Oxynitrides of Silicon in Relation to Their Structures," Trans. J. Br. Ceram. Soc., 74 [2] 49 (1975).
    • (1975) Trans. J. Br. Ceram. Soc. , vol.74 , Issue.2 , pp. 49
    • Henderson, C.M.B.1    Taylor, D.2
  • 15
    • 0024132621 scopus 로고
    • Toughening behavior in whisker-reinforced ceramic matrix composites
    • P. F. Becher, C.-H. Hsueh, P. Angeleni, and T. N. Tiegs, "Toughening Behavior in Whisker-Reinforced Ceramic Matrix Composites," J. Am. Ceram. Soc., 71 [12] 1050-51 (1988).
    • (1988) J. Am. Ceram. Soc. , vol.71 , Issue.12 , pp. 1050-1051
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.