Corrosion-induced degradation of microelectronic devices

Semiconductor Science and Technology

Volumn 11, Issue 2, 1996, Pages 155-162

  Osenbach, John W ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; CORROSION; DEGRADATION; ELECTRONICS INDUSTRY; INTEGRATED CIRCUITS; METALLIZING; PH; RELIABILITY; THERMODYNAMICS;

CORROSION INDUCED DEGRADATION; METALLIZATION; MICROELECTRONIC CIRCUITS; MICROELECTRONIC DEVICES; POURBAIX DIAGRAMS;

MICROELECTRONICS;

EID: 0030086024     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/11/2/002     Document Type: Review

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