Silicon-based fabrication process for production of optical waveguides

IEE Proceedings: Optoelectronics

Volumn 143, Issue 1, 1996, Pages 37-40

  Johnston, I R ^a   Parker, G J ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

Optical interconnects; Optoelectronic ICs; Silicon waveguides

Indexed keywords

DRY ETCHING; ETCHING; INTEGRATED CIRCUIT MANUFACTURE; OPTICAL INTERCONNECTS; OPTICAL WAVEGUIDES; OXIDATION; SEMICONDUCTING SILICON; SILICA; SILICON NITRIDE; SILICON ON INSULATOR TECHNOLOGY; THICK FILMS; VLSI CIRCUITS;

LIGHT FIELD PATTERN; MICRON THICK OXIDE LAYER; SILICON OPTOELECTRONICS INTEGRATED CIRCUITS; SILICON WAVEGUIDES; SINGLE CRYSTAL SILICON CORE;

INTEGRATED OPTOELECTRONICS;

EID: 0030085945     PISSN: 13502433     EISSN: None     Source Type: Journal    
DOI: 10.1049/ip-opt:19960133     Document Type: Article

References (19)

1. SOREF, R.A., and LORENZO, J.P.: 'Silicon guided wave optics', Solid-State Technol., 1988, 31, pp. 95-98
2. HALL, D.G.: 'Survey of silicon-based integrated optics', Computer, 1987, 20, pp. 25-32
3. PAL, B.P.: 'Guided-wave optics on silicon-physics, technology and status', Prog. Opt., 1993, 32, pp. 3-59
4. SPLETT, A., and PETERMANN, K.: 'Low loss single-mode optical waveguides with large cross-section in standard epitaxial silicon', IEEE Photonics Technol. Lett., 1994, 6, pp. 425-427
5. SOREF, R.A., and LORENZO, J.P.: 'Single-crystal silicon: a new material for 1.3 and 1.6m integrated-optical components', Electron. Lett., 1985, 21, pp. 953-954
6. NOWAK, E.D., DING, L., LOH, Y.T., and HU, C.: 'Speed, power, and yield comparison of thin bonded soi versus bulk cmos technologies'. Proceedings of 1994 IEEE international conference on SOI, October 1994, pp. 41-42
7. KURDI, B.N., and HALL, D.G.: 'Optical waveguides in oxygen-implanted buried-oxide silicon-on-insulator structures', Opt. Lett., 1988, 13, pp. 175-177
8. RICKMAN, A.G., REED, G.T., and NAMAVAR, F.: 'Silicon-on-insulator optical rib waveguide loss and mode characteristics', J. Lightwave Technol., 1994, 12, pp. 1771-1776
9. RICKMAN, A.G., REED, G.T., WEISS, B.L., and NAMAVAR, F.: 'Low-loss planar optical waveguides fabricated in simox material', IEEE Photonics Technol. Lett., 1992, 4, pp. 633-635
10. SCHMIDTCHEN, J., SPLETT, A., SCHÜPPERT, B., PETERMANN, K., and BURBACH, G.: 'Low-loss singlemode optical waveguides with large cross-section in silicon-on-insulator', Electron. Lett., 1991, 27, pp. 1496-1488
11. RICKMAN, A.G., and REED, G.T.: 'Silicon-on-insulator optical rib waveguides: Loss, mode characteristics, bends and y-junctions', IEE Proc., Optoelectron., 1994, 141, pp. 391-393
12. WEISS, B.L., REED, G.T., TOH, S.K., SOREF, R.A., and NAMAVAR, F.: 'Optical waveguides in simox structures', IEEE Photonics Technol. Lett., 1991, 3, pp. 19-21
13. MASZARA, W.P., GOETZ, G., CAVIGLIA, A., and MCKITTERICK, J.B.: 'Bonding of silicon wafers for silicon-on-insulator', J. Appl. Phys., 1988, 64, pp. 4943-4950
14. REED, G.T., JINHUA, L., TANG, C.K., CHENGLU, L., HEMMENT, P.L.F., and RICKMAN, A.G.: 'Silicon-on-insulator optical waveguides formed by direct wafer bonding', Mater. Sci. Eng., 1992, B15, pp. 156-159
15. ZINKE, T., FISCHER, U., SPLETT, A., SCHÜPPERT, B., and PETERMANN, K.: 'Comparison of optical waveguide losses in silicon-on-insulator', Electron. Lett., 1993, 29, pp. 2031-2033
16. FRENCH, P.J., MURO, H., SHINOHARA, T., NOJIRI, H., and KANEKO, H.: 'SOI pressure sensor'. Transducers '91, international conference on Solid-state sensors and actuators, 1991, pp. 181-184
17. HIRAI, Y., MORIMOTO, K., NIWA, M., YUKI, K., and YASUI, J.: 'Fabrication of silicon quantum wires and dots', IEICE Trans. Electron., 1994, E77-C, pp. 1426-1430
18. SZE, S.M.: 'Semiconductor devices, physics and technology' (Wiley, 1985)
19. MOSS, T.S., BURRELL, G.J., and ELLIS, B.: 'Semiconductor opto-electronics' (Butterworth, 1973)