Monte Carlo simulation of RF plasmas and trial investigation of similarity rule

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 2 PART A, 1996, Pages 748-756

  Kondoh, Yoshiomi ^a   Onozato, Atsushi ^a   Matsuoka, Akio ^a   Ishii, Masayoshi ^a   Goto, Makoto ^a   Sugawara, Minoru ^b  

^a GUNMA UNIVERSITY   (Japan)

^b HACHINOHE INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Ar plasma; Ion sheath; Monte Carlo simulation; RF plasmas; Similarity rule

Indexed keywords

ARGON; CARRIER CONCENTRATION; COMPUTER SIMULATION; CURRENT DENSITY; ELECTRIC FIELDS; ELECTRIC IMPEDANCE; IONS; MONTE CARLO METHODS; PLASMA COLLISION PROCESSES; PLASMA SHEATHS;

ARGON PLASMA; CONDUCTION CURRENT DENSITY; EXCITATION COLLISIONS; ION SHEATH; MEAN ELECTRON VELOCITY; RADIOFREQUENCY PLASMAS; SHEATH BOUNDARY; SIMILARITY RULE;

PLASMAS;

EID: 0030085793     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.748     Document Type: Article

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