SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Applied Physics A: Materials Science and Processing

Volumn 62, Issue 2, 1996, Pages 103-114

KrF-excimer-laser-induced native oxide removal from Si(100) surfaces studied by Auger electron spectroscopy

(3) Larciprete, R a Borsella, E a Cinti, P b

a ENEA (Italy)

b ENEA (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON SPECTROSCOPY; LASER APPLICATIONS; MORPHOLOGY; OXIDES; SEMICONDUCTING SILICON; SURFACE CLEANING; SURFACE TREATMENT; SURFACES;

OXIDE REMOVAL;

SEMICONDUCTOR MATERIALS;

EID: 0030085572 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/BF01575708 Document Type: Article

Times cited : (19)

References (54)

1
- 0012019104
- J.A. Martin, D.E. Savage, W. Moritz, M.G. Lagally: Phys. Rev. Lett. 56, 1936 (1985)
- (1985) Phys. Rev. Lett. , vol.56 , pp. 1936
- Martin, J.A.¹ Savage, D.E.² Moritz, W.³ Lagally, M.G.⁴

2
- 84881596881
- J.P. Becker, R.G. Long, J.E. Mahan: J. Vac. Sci. Technol. A 12, 174 (1994)
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 174
- Becker, J.P.¹ Long, R.G.² Mahan, J.E.³

3
- 84957232144
- D. Dijkkamp, E.J. van Loenen, A.J. Hoeven, J. Dieleman: J. Vac. Sci. Technol. A 8, 218 (1990)
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 218
- Dijkkamp, D.¹ Van Loenen, E.J.² Hoeven, A.J.³ Dieleman, J.⁴

4
- 0007508374
- R. Reif: J. Vac. Sci. Technol. A 2, 429 (1984)
- (1984) J. Vac. Sci. Technol. A , vol.2 , pp. 429
- Reif, R.¹

5
- 0025481119
- E. Taglauer: Appl. Phys. A 51, 238 (1990)
- (1990) Appl. Phys. A , vol.51 , pp. 238
- Taglauer, E.¹

6
- 0014800514
- W. Kern, D.A. Puotinen: RCA Rev. 31, 187 (1970)
- (1970) RCA Rev. , vol.31 , pp. 187
- Kern, W.¹ Puotinen, D.A.²

7
- 0022699183
- A. Ishizaka, Y. Shiraki: J. Electrochem. Soc. 133, 666 (1986)
- (1986) J. Electrochem. Soc. , vol.133 , pp. 666
- Ishizaka, A.¹ Shiraki, Y.²

8
- 0000703152
- E. Yablonovitch, D.L. Allara, C.C. Chang, T. Gmitter, T.B. Bright: Phys. Rev. Lett. 57, 249 (1986)
- (1986) Phys. Rev. Lett. , vol.57 , pp. 249
- Yablonovitch, E.¹ Allara, D.L.² Chang, C.C.³ Gmitter, T.⁴ Bright, T.B.⁵

9
- 0022662543
- M. Grundner, H. Jacob: Appl. Phys. A 39, 73 (1986)
- (1986) Appl. Phys. A , vol.39 , pp. 73
- Grundner, M.¹ Jacob, H.²

10
- 36549099751
- V.A. Burrows, Y.J. Chabal, G.S. Higashi, K. Raghavachari, S.B. Christmas: Appl. Phys. Lett. 53, 998 (1988)
- (1988) Appl. Phys. Lett. , vol.53 , pp. 998
- Burrows, V.A.¹ Chabal, Y.J.² Higashi, G.S.³ Raghavachari, K.⁴ Christmas, S.B.⁵

11
- 45249126098
- P.J. Grunthaner, F.G. Grunthaner, R.W. Fathauer, T.L. Lin, M.H. Hecht, L.D. Bell, W.J. Kaiser: Thin Solid Films 183, 197 (1989)
- (1989) Thin Solid Films , vol.183 , pp. 197
- Grunthaner, P.J.¹ Grunthaner, F.G.² Fathauer, R.W.³ Lin, T.L.⁴ Hecht, M.H.⁵ Bell, L.D.⁶ Kaiser, W.J.⁷

12
- 21544433109
- G.S. Higashi, Y.J. Chabal, G.W. Trucks, K. Raghavachari: Appl. Phys. Lett. 56, 656 (1990)
- (1990) Appl. Phys. Lett. , vol.56 , pp. 656
- Higashi, G.S.¹ Chabal, Y.J.² Trucks, G.W.³ Raghavachari, K.⁴

13
- 0000597344
- P. Dumas, Y.J. Chabal, G.S. Higashi: Phys. Rev. Lett. 65, 1124 (1990)
- (1990) Phys. Rev. Lett. , vol.65 , pp. 1124
- Dumas, P.¹ Chabal, Y.J.² Higashi, G.S.³

14
- 0001544025
- S.R. Kasi, M. Liehr, P.A. Thiry, H. Dallaporta, M. Offenberg: Appl. Phys. Lett. 59, 108 (1991)
- (1991) Appl. Phys. Lett. , vol.59 , pp. 108
- Kasi, S.R.¹ Liehr, M.² Thiry, P.A.³ Dallaporta, H.⁴ Offenberg, M.⁵

15
- 0028515640
- Y.F. Lu, M. Takai, S. Komuro, T. Shiokawa, Y. Aoyagi: Appl. Phys. A 59, 281 (1994)
- (1994) Appl. Phys. A , vol.59 , pp. 281
- Lu, Y.F.¹ Takai, M.² Komuro, S.³ Shiokawa, T.⁴ Aoyagi, Y.⁵

16
- 36449005632
- K. Imen, S.J. Lee, S.D. Allen: Appl. Phys. Lett. 58, 203 (1994)
- (1994) Appl. Phys. Lett. , vol.58 , pp. 203
- Imen, K.¹ Lee, S.J.² Allen, S.D.³

17
- 0001248896
- W. Zapka, W. Ziemlich, A.C. Tam: Appl. Phys. Lett. 58, 2217 (1991)
- (1991) Appl. Phys. Lett. , vol.58 , pp. 2217
- Zapka, W.¹ Ziemlich, W.² Tam, A.C.³

18
- 0039747175
- D.M. Zehner, C.W. White, G.W. Ownby: Appl. Phys. Lett. 36, 56 (1980)
- (1980) Appl. Phys. Lett. , vol.36 , pp. 56
- Zehner, D.M.¹ White, C.W.² Ownby, G.W.³

19
- 0043034100
- D.M. Zehner, C.W. White, G.W. Ownby: Surf. Sci. 92, L67 (1980)
- (1980) Surf. Sci. , vol.92
- Zehner, D.M.¹ White, C.W.² Ownby, G.W.³

20
- 0347415011
- A. McKinley, A.W. Parke, G.J. Hughes, J. Fryar, R.H. Williams: J. Phys. D 13, L193 (1980)
- (1980) J. Phys. D , vol.13
- McKinley, A.¹ Parke, A.W.² Hughes, G.J.³ Fryar, J.⁴ Williams, R.H.⁵

21
- 0019622457
- A. McKinley, R.H. Williams, A.W. Parke, G.P. Srivastava: Vacuum 31, 549 (1981)
- (1981) Vacuum , vol.31 , pp. 549
- McKinley, A.¹ Williams, R.H.² Parke, A.W.³ Srivastava, G.P.⁴

22
- 0019056964
- P.L. Cowan, J.A. Golovchenko: J. Vac. Sci. Technol. 17, 1197 (1980)
- (1980) J. Vac. Sci. Technol. , vol.17 , pp. 1197
- Cowan, P.L.¹ Golovchenko, J.A.²

23
- 0019927464
- V.M. Bermudez: J. Vac. Sci. Technol. 20, 51 (1982)
- (1982) J. Vac. Sci. Technol. , vol.20 , pp. 51
- Bermudez, V.M.¹

24
- 0008751645
- Z.L. Wang, J.F.M. Westendorp, F.W. Saris: Nucl. Instrum. Methods 211, 193 (1983)
- (1983) Nucl. Instrum. Methods , vol.211 , pp. 193
- Wang, Z.L.¹ Westendorp, J.F.M.² Saris, F.W.³

25
- 0018999236
- D.M. Zehner, J.R. Nooham, H.L. Davis, C.W. White: J. Vac. Sci. Technol. 18, 852 (1981)
- (1981) J. Vac. Sci. Technol. , vol.18 , pp. 852
- Zehner, D.M.¹ Nooham, J.R.² Davis, H.L.³ White, C.W.⁴

26
- 4244150824
- Y.J. Chabal, J.E. Rowe, D.A. Zwemer: Phys. Rev. Lett. 46, 600 (1983)
- (1983) Phys. Rev. Lett. , vol.46 , pp. 600
- Chabal, Y.J.¹ Rowe, J.E.² Zwemer, D.A.³

27
- 0024886597
- J. Kubatova, V. Chab, I. Lukes, P. Jiricek, F. Fendrych: Appl. Surf. Sci. 43, 297 (1989)
- (1989) Appl. Surf. Sci. , vol.43 , pp. 297
- Kubatova, J.¹ Chab, V.² Lukes, I.³ Jiricek, P.⁴ Fendrych, F.⁵

28
- 84953684145
- R. Tsu, D. Lubben, T.R. Bramblett, J.E. Greene: J. Vac. Sci. Technol. A 9, 223 (1991)
- (1991) J. Vac. Sci. Technol. A , vol.9 , pp. 223
- Tsu, R.¹ Lubben, D.² Bramblett, T.R.³ Greene, J.E.⁴

29
- 0026727506
- H. Schlemm, F. Buchmann, H.D. Geiler: Appl. Surf. Sci. 54, 298 (1992)
- (1992) Appl. Surf. Sci. , vol.54 , pp. 298
- Schlemm, H.¹ Buchmann, F.² Geiler, H.D.³

30
- 21144475616
- J.K. Watanabe, U.J. Gibson: J. Vac. Sci. Technol. A 10, 823 (1992)
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 823
- Watanabe, J.K.¹ Gibson, U.J.²

31
- 6144271934
- P.J. Grunthaner, M.H. Hetch, F.J. Grunthaner, N.H. Johnson: J. Appl. Phys. 81, 629 (1987)
- (1987) J. Appl. Phys. , vol.81 , pp. 629
- Grunthaner, P.J.¹ Hetch, M.H.² Grunthaner, F.J.³ Johnson, N.H.⁴

32
- 0024766746
- N. Miyata, K. Moriki, M. Fujisawa, M. Hirayama, T. Matsukawa, T. Hattori: Jpn. J. Appl. Phys. 28, L2072 (1989)
- (1989) Jpn. J. Appl. Phys. , vol.28
- Miyata, N.¹ Moriki, K.² Fujisawa, M.³ Hirayama, M.⁴ Matsukawa, T.⁵ Hattori, T.⁶

33
- 21544451249
- H. Akazawa, Y. Utsumi, J. Takahashi, T. Urisu: Appl. Phys. Lett. 57, 2302 (1990)
- (1990) Appl. Phys. Lett. , vol.57 , pp. 2302
- Akazawa, H.¹ Utsumi, Y.² Takahashi, J.³ Urisu, T.⁴

34
- 0027867585
- K. Sugioka, S. Wada, A. Tsunemi, T. Sakai, H. Takai, H. Moriwaki, A. Nakamura, H. Tashiro, K. Toyoda: Jpn. J. Appl. Phys. 32, 6185 (1993)
- (1993) Jpn. J. Appl. Phys. , vol.32 , pp. 6185
- Sugioka, K.¹ Wada, S.² Tsunemi, A.³ Sakai, T.⁴ Takai, H.⁵ Moriwaki, H.⁶ Nakamura, A.⁷ Tashiro, H.⁸ Toyoda, K.⁹

35
- 0000795198
- C. Fiori, R.A.B. Devine: Phys. Rev. Lett. 23, 2081 (1984)
- (1984) Phys. Rev. Lett. , vol.23 , pp. 2081
- Fiori, C.¹ Devine, R.A.B.²

36
- 0001687190
- C. Fiori, R.A.B. Devine: Appl. Phys. Lett. 47, 361 (1985)
- (1985) Appl. Phys. Lett. , vol.47 , pp. 361
- Fiori, C.¹ Devine, R.A.B.²

37
- 0024301846
- S. De Unamuno, E. Fogarassy: Appl. Surf. Sci. 36, 1 (1989)
- (1989) Appl. Surf. Sci. , vol.36 , pp. 1
- De Unamuno, S.¹ Fogarassy, E.²

38
- 0004259685
- ed. by J.M. Poate, J.W. Mayer Academic, New York
- P. Baeri, S. Campisano: In Laser Annealing of Semiconductors, ed. by J.M. Poate, J.W. Mayer (Academic, New York, 1982)
- (1982) Laser Annealing of Semiconductors
- Baeri, P.¹ Campisano, S.²

39
- 0001609285
- G.E. Jellison, D.H. Lowndes, D.N. Mashburn, R.F. Wood: Phys. Rev. B 34, 2407 (1986)
- (1986) Phys. Rev. B , vol.34 , pp. 2407
- Jellison, G.E.¹ Lowndes, D.H.² Mashburn, D.N.³ Wood, R.F.⁴

40
- 36449005097
- J. Sous, C.N. Afonso: J. Appl. Phys. 69, 2105 (1991)
- (1991) J. Appl. Phys. , vol.69 , pp. 2105
- Sous, J.¹ Afonso, C.N.²

41
- 0022027577
- R. Kelly, J.E. Rothenberg: Nucl. Instrum. Methods 7/8, 755 (1985)
- (1985) Nucl. Instrum. Methods , vol.7-8 , pp. 755
- Kelly, R.¹ Rothenberg, J.E.²

42
- 30244471104
- M. Berti, L.F. Dona dalle Rose, A. Drigo, C. Cohen, J. Siejka, G.G. Bentini, E. Jannitti: Phys. Rev. B 34, 2346 (1985)
- (1985) Phys. Rev. B , vol.34 , pp. 2346
- Berti, M.¹ Dona Dalle Rose, L.F.² Drigo, A.³ Cohen, C.⁴ Siejka, J.⁵ Bentini, G.G.⁶ Jannitti, E.⁷

43
- 0001560426
- N. Miyata, M. Shigeno, Y. Arimoto, T. Ito: J. Appl. Phys. 74, 5275 (1993)
- (1993) J. Appl. Phys. , vol.74 , pp. 5275
- Miyata, N.¹ Shigeno, M.² Arimoto, Y.³ Ito, T.⁴

44
- 6144248775
- K. Hoh, H. Koyama, K. Uda, Y. Miura: Jpn. J. Appl. Phys. 19, L375 (1980)
- (1980) Jpn. J. Appl. Phys. , vol.19
- Hoh, K.¹ Koyama, H.² Uda, K.³ Miura, Y.⁴

45
- 0024925121
- I. Lukes, R. Sasik, J. Kubtov: Rev. Roum. Phys. 34, 909 (1989)
- (1989) Rev. Roum. Phys. , vol.34 , pp. 909
- Lukes, I.¹ Sasik, R.² Kubtov, J.³

46
- 6144277214
- Sunny Beach (Bulgaria)
- I. Lukes, R. Sasik, J. Polecha, J. Kubatova: Proc. 5th Int'l School on Quantum Electronics, Sunny Beach (Bulgaria) (1988)
- (1988) Proc. 5th Int'l School on Quantum Electronics
- Lukes, I.¹ Sasik, R.² Polecha, J.³ Kubatova, J.⁴

47
- 6144260961
- VCH, Heidelberg
- L. Gmelin: Gmellin's Handbuch (VCH, Heidelberg, 1959)
- (1959) Gmellin's Handbuch
- Gmelin, L.¹

48
- 6144235379
- R. Larciprete, E. Borsella: J. Electron. Spectrosc. Relat. Phenom. (in press)
- J. Electron. Spectrosc. Relat. Phenom. (in Press)
- Larciprete, R.¹ Borsella, E.²

49
- 0004100646
- IOP, Bristol
- I. Ferguson: Auger Microprobe Analysis (IOP, Bristol 1989)
- (1989) Auger Microprobe Analysis
- Ferguson, I.¹

50
- 18844444832
- C.C. Chang, D.M. Boulin: Surf. Sci. 69, 385 (1977)
- (1977) Surf. Sci. , vol.69 , pp. 385
- Chang, C.C.¹ Boulin, D.M.²

51
- 84914791718
- O. Millo, A. Many, Y. Goldstein: J. Vac. Sci. Technol. A 7, 2688 (1989)
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 2688
- Millo, O.¹ Many, A.² Goldstein, Y.³

52
- 0020843991
- R. Memeo, F. Ciccacci, C. Mariani, S. Ossicini: Thin Solid Films 109, 159 (1983)
- (1983) Thin Solid Films , vol.109 , pp. 159
- Memeo, R.¹ Ciccacci, F.² Mariani, C.³ Ossicini, S.⁴

53
- 0018436046
- M.P. Seah, W.A. Dentch: Surf. Interface Anal. 1, 2 (1979)
- (1979) Surf. Interface Anal. , vol.1 , pp. 2
- Seah, M.P.¹ Dentch, W.A.²

54
- 0001059493
- A. Ishizaka, S. Iwata, Y. Kamigaki: Surf. Sci. 84, 355 (1979)
- (1979) Surf. Sci. , vol.84 , pp. 355
- Ishizaka, A.¹ Iwata, S.² Kamigaki, Y.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.