Surface morphology of polycrystalline diamond films etched by Ar+ beam bombardment

Journal of Materials Science

Volumn 31, Issue 3, 1996, Pages 603-606

  Saitoh, Hidetoshi ^a,b   Kyuno, Takunori ^a   Hosoda, Ichiro ^a   Urao, Ryoichi ^a  

^a IBARAKI UNIVERSITY   (Japan)

^b NAGAOKA UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; ION BEAMS; ION BOMBARDMENT; MORPHOLOGY; POLYCRYSTALLINE MATERIALS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SINGLE CRYSTALS; SURFACE ROUGHNESS; SURFACE TREATMENT; SURFACES;

ARGON BEAM BOMBARDMENT; COMBUSTION FLAME TECHNIQUE; ION SPUTTERING APPARATUS; OPTICAL PYROMETER; POLYCRYSTALLINE DIAMOND FILMS; SUBSTRATE TEMPERATURE;

DIAMOND FILMS;

EID: 0030085389     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF00367874     Document Type: Article

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