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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 2 SUPPL. B, 1996, Pages 882-886

Experimental study of impact ionization phenomena in sub-0.1 μm Si metal-oxide-semiconductor field effect transistors (MOSFETs)

(4) Hori, Atsushi a Hiroki, Akira a Akamatsu, Kaori Moriyama a Odanaka, Shinji a

a PANASONIC CORPORATION (Japan)

Author keywords

Electric field; Hot carrier; Impact ionization; MOS; Pocket implantation; Reliability; Si; Substrate current

Indexed keywords

COMPUTER SIMULATION; ELECTRIC CURRENTS; ELECTRIC FIELDS; ELECTRODES; GATES (TRANSISTOR); HOT CARRIERS; IONIZATION OF SOLIDS; OXIDATION; OXIDES; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES;

ARSENIC IMPLANTATION; GATE OXIDE; IMPACT IONIZATION; LOCAL OXIDATION OF SILICON; POCKET IMPLANTATION TECHNOLOGY; POLYSILICON GATE ELECTRODES;

MOSFET DEVICES;

EID: 0030085172 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.35.882 Document Type: Article

Times cited : (3)

References (10)

1
- 84945713471
- C. Hu, S. C. Tan, F-C. Hsu, P-K. Ko, T-Y. Chan and K. Terrill: IEEE Trans. Electron Devices 32 (1985) 375.
- (1985) IEEE Trans. Electron Devices , vol.32 , pp. 375
- Hu, C.¹ Tan, S.C.² Hsu, F.-C.³ Ko, P.-K.⁴ Chan, T.-Y.⁵ Terrill, K.⁶

2
- 77953132069
- T. Mizuno, A. Toriumi, M. Iwase, M. Takahashi, H. Niijima, M. Fukumoto and M. Yoshimi: Tech. Dig. IEDM (1992) p. 695.
- (1992) Tech. Dig. IEDM , pp. 695
- Mizuno, T.¹ Toriumi, A.² Iwase, M.³ Takahashi, M.⁴ Niijima, H.⁵ Fukumoto, M.⁶ Yoshimi, M.⁷

3
- 4243193413
- A. Hori, A. Hiroki, A. K. Akmatsu and S. Odanaka: Tech. Dig. SSDM (1995) p. 881.
- (1995) Tech. Dig. SSDM , pp. 881
- Hori, A.¹ Hiroki, A.² Akmatsu, A.K.³ Odanaka, S.⁴

4
- 0029196676
- A. Hori, A. Hiroki, H. Nakaoka, M. Segawa and T. Hori: IEEE 42 (1995) 78.
- (1995) IEEE , vol.42 , pp. 78
- Hori, A.¹ Hiroki, A.² Nakaoka, H.³ Segawa, M.⁴ Hori, T.⁵

5
- 0028736932
- A. Hori, H. Nakaoka, H. Umimoto, K. Yamashita, M. Takase, N. Shimizu, B. Mizuno and S. Odanaka: Tech. Dig. IEDM (1994) p. 485.
- (1994) Tech. Dig. IEDM , pp. 485
- Hori, A.¹ Nakaoka, H.² Umimoto, H.³ Yamashita, K.⁴ Takase, M.⁵ Shimizu, N.⁶ Mizuno, B.⁷ Odanaka, S.⁸

6
- 85067378640
- L. Manchanda, R. H. Storz, R. H. Yan, K. F. Lee and E. H. Weterwick: Tech. Dig. IEDM (1992) p. 994.
- (1992) Tech. Dig. IEDM , pp. 994
- Manchanda, L.¹ Storz, R.H.² Yan, R.H.³ Lee, K.F.⁴ Weterwick, E.H.⁵

7
- 4243166695
- F. Balestra, T. Matsumoto, T. Shimatani, M. Tsuno, H. Nakabayashi and M. Koyanagi: Tech. Dig. SSDM (1994) p. 886.
- (1994) Tech. Dig. SSDM , pp. 886
- Balestra, F.¹ Matsumoto, T.² Shimatani, T.³ Tsuno, M.⁴ Nakabayashi, H.⁵ Koyanagi, M.⁶

8
- 0026152377
- S. Odanaka, A. Hiroki, K. Ohe, K. Moriyama and H. Umimoto: IEEE Computer Aided Design 24 (1991) 619.
- (1991) IEEE Computer Aided Design , vol.24 , pp. 619
- Odanaka, S.¹ Hiroki, A.² Ohe, K.³ Moriyama, K.⁴ Umimoto, H.⁵

9
- 0028758551
- K. Taniguchi, M. Yamaji, K. Sonoda, T. Kunikiyo and C. Hamaguchi: Tech. Dig. IEDM (1994) p. 355.
- (1994) Tech. Dig. IEDM , pp. 355
- Taniguchi, K.¹ Yamaji, M.² Sonoda, K.³ Kunikiyo, T.⁴ Hamaguchi, C.⁵

10
- 0024092336
- G. G. Shahidi, D. A. Antoniadis and H. I. Smith: IEEE Electron Device Lett. (1988) 497.
- (1988) IEEE Electron Device Lett. , pp. 497
- Shahidi, G.G.¹ Antoniadis, D.A.² Smith, H.I.³

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