Measurements of the time-averaged sheath drop using the gridded energy analyzer

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 35, Issue 2 A, 1996, Pages

  Sando, Kazumasa ^a   Sugawara, Minoru ^a  

^a GUNMA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; ELECTRODES; ELECTRON ENERGY ANALYZERS; IONS; PRESSURE MEASUREMENT; VOLTAGE MEASUREMENT;

EARTHED ELECTRODE; RADIOFREQUENCY POWER; RETARDING GRIDDED ENERGY ANALYZER; SELF BIAS; TIME AVERAGE SHEATH DROP; VOLTAGE AMPLITUDE; VOLTAGE DROP;

ELECTRIC CHARGE;

EID: 0030084262     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.35.L171     Document Type: Article

References (6)