Studies on correlation between the quality of GaAs LEC crystals and the inert gas pressure

Journal of Crystal Growth

Volumn 158, Issue 4, 1996, Pages 409-417

  Seifert, M ^a   Neubert, M ^a   Ulrici, W ^b   Wiedemann, B ^c   Donecker, J ^a   Kluge, J ^a   Wolf, E ^a   Klinger, D ^a   Rudolph, P ^a  

^a LEIBNIZ INSTITUTE FOR CRYSTAL GROWTH   (Germany)

^b PAUL DRUDE INSTITUT FÜR FESTKÖRPERELEKTRONIK   (Germany)

^c GOETHE UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; CARBON; ELECTRIC CONDUCTIVITY; IMPURITIES; PRESSURE EFFECTS; SEMICONDUCTING GALLIUM ARSENIDE; SINGLE CRYSTALS;

DISLOCATION CELL BOUNDARIES; ELECTRICAL PARAMETERS; ETCH PIT DENSITY; INERT GAS PRESSURE; LIQUID ENCAPSULATED CZOCHRALSKI; OXYGEN CONCENTRATION; RESIDUAL IMPURITY CONCENTRATION; STRUCTURAL PERFECTION; SURFACE STATE;

CRYSTAL GROWTH FROM MELT;

EID: 0030084216     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-0248(95)00546-3     Document Type: Article

References (25)

1. U. Lambert and U. Wiese, Advan. Mater. 3 (1991) 429.
2. J. Nishio and K. Terashima, J. Crystal Growth 96 (1989) 605.
3. F. Ericson, K. Hjort, J.-A. Schweitz, S. Anderson and E. Janzen, J. Crystal Growth 143 (1994) 22.
4. A.T. Hunter, H. Kimura, J.P. Bauhus, H.V. Winston and O.J. Marsh, Appl. Phys. Lett. 44 (1984) 74.
5. Final Report of Wacker-Chemitronic GmbH, FE-Vorhaben NT 2766B5, Burghausen 1991.
6. H. Emori, K. Terashima, F. Onto, T. Kikuta and T. Fukuda, in: Proc. 3rd Conf. on Semi-insulating III-V Materials, Kah-nee-ta 1984, Eds. D.C. Look and J.S. Blakmore (Shiva, Nantwich, 1984) p. 1411.
7. Y. Katoda, M. Kakimoto, Y. Masa, A. Tanaka and T. Yokohama, in: Proc. 3rd Conf. on Semi-insulating UI-V Materials, Ka-nee-ta 1984, Eds. D.C. Look and J.S. Blak-more (Shiva, Nantwich, 1984) p. 157.
8. B. Wiedemann, K. Bethge, A. Safavi and W. Schütze, in: Annual Report of the Institute for Nuclear Physics of the University in Frankfurt a.M., IKF 51 (1991) 54.
9. M. Tatsumi, T. Kawase, Y. Iguchi, K. Fujita and M. Yamada in: Proc. 8th Conf. on Semi-insulating III-V Materials, Warsaw 1994, Ed. M. Godlewski (World Scientific, Singapore, 1994) p. 11.
10. B. Wiedemann, K. Bethge, Th. Kessler, W. Schütze, C. Venzago, M. Waldschmidt, G. Wolf, H. Engelhardt and D. Müller, in: Proc. European Vacuum Conf., Trieste, Italy, 1990.
11. J.D. Meyer, K. Bethge, J. Krauskopf, A. Mader, R.W. Michelmann, W. Schütze, C. Venzago, M. Waldschmidt, B. Wiedemann and G. Wolf, in: Proc 6th Conf. on Semi-Insulating III-V Materials, Toronto 1990, Eds. A. Miles and C. Miner (Adam Hilger, Bristol, 1990) p. 353.
12. H.Ch. Alt, Semicond. Sei. Technol. 3 (1988) 154.
13. M. Skowronski, in: Deep Centers in Semiconductors, Ed. S.T. Pantelides (Gordon and Breach, New York, 1992) p. 379.
14. B. Ulrici, R. Stedman and W. Ulrici, Phys. Status Solidi (b) 143 (1987) K135.
15. C. Song, B. Pajot and F. Gendron, J. Appl. Phys. 67 (1990) 7307.
16. J. Chevallier, B. Clerjaud and B. Pajot, in: Semiconductors and Semimetals, Vol. 34, Eds. J.J. Pankove and N.M. Johnson (Academic Press, San Diego, 1991) p. 447.
17. T. Arai, T. Nozaki, J. Osaka and M. Tajima, in: Proc. 5th Conf. on Semi-Insulating III-V Materials, Malmö 1988, Eds. G. Grossmann and L. Ledebo (Adam Hilger, Bristol, 1988) p. 201.
18. H.Ch. Alt and B. Dischler, Appl. Phys. Lett. 66 (1995) 61.
19. A.G. Elliot, A. Flat and D.A. Vanderwater, J. Crystal Growth 121 (1992) 349.
20. J.P.Tower, R. Tobin, P.J. Pearak and R.M. Ware, J. Crystal Growth 114 (1991) 665.
21. A.S. Jordan, J. Crystal Growth 49 (1980) 631.
22. R.M. Ware, P.J. Doering, B. Freidenreich, R.T. Koegel and T. Collins, Semicond. Sci. Technol. 7 (1992) 224; See also: Y. Otoki, M. Sahara, S. Shinzawa and S. Kuma, Mater. Sci. Forum 117/118 (1993) 405.
23. R.M. Ware, P.J. Doering, B. Freidenreich, R.T. Koegel and T. Collins, Semicond. Sci. Technol. 7 (1992) 224; See also: Y. Otoki, M. Sahara, S. Shinzawa and S. Kuma, Mater. Sci. Forum 117/118 (1993) 405.
24. F. Onto, Y. Yamada, K. Katano, F. Yajima and T. Okano, in: Defect Control in Semiconductors, Ed. K. Sumino (North-Holland, Amsterdam, 1990) p. 771.
25. O. Oda, H. Yamamoto, K. Kainosho, T. Imaizumi and H. Okazaki, in: Proc. 5th Int. Conf. on Defect Recognization and Image Processing in Semiconductors and Devices, Santander, Spain, 1993.