Application of electron-beam testing technique to potential profile measurement in a-Si:H solar cells at various states of operation

Microelectronic Engineering

Volumn 31, Issue 1-4, 1996, Pages 25-32

  Jank, A ^a   Jung, M ^a   Lambert, M ^a   Lichter, G ^a   Schmoranzer, H ^a  

^a University of Koblenz Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ANNEALING; DEGRADATION; ELECTRIC FIELD MEASUREMENT; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRON ENERGY LEVELS; MASKS; PLASMA ETCHING; SILICON SOLAR CELLS;

ELECTRON BEAM TESTING; POTENTIAL PROFILE MEASUREMENT;

SEMICONDUCTOR DEVICE TESTING;

EID: 0030084147     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-9317(95)00322-3     Document Type: Article

References (8)

1. D. Caputo, F. Irrera and F. Palma, Hyperbolic approximation of non-uniform electric field for an analytical solution of the a-Si p-i-n structure, in: A. Luque et al., ed., Proc. 9th E. C. Photovoltaic Solar Energy Conf., Kluwer Acad. Publ., Dordrecht, 1989, pp. 95-98
2. Y. Hamakawa and H. Okamoto, Amorphous Semiconductor Technologies & Devices, Ohmsha Ltd., Tokyo, 1983
3. R. Heiland and A. Leslie, Combining electron and focused ion beam techniques for failure analysis and design verification of integrated circuits, Microelectronic Engineering 24 (1994) 51-58
4. A. Jank, M. Jung, M. Lambert, G. Lichter and H. Schmoranzer, Utilization of an electron-beam tester for determining internal electric field profiles in micro-structured thin-film semiconductor devices, submitted to Scanning Microscopy (1995)
5. A. Jank, M. Jung and H. Schmoranzer, Application of electron-beam testing technique to potential profile measurements in thin film semiconductor devices, Microelectronic Engineering 24 (1994) 139-146
6. A. Jank, A. Mayer and H. Schmoranzer, Measurement of the electric field distribution in submicron semiconductor film devices by electron-beam testing, in: A. Lopez-Galindo and M. I. Rodriguez-Garcia, ed., Electron Microscopy 92, Universidad de Granada, Granada, 1992, Vol. II pp. 197-198
7. H. Pfleiderer, Surface recombination in a-Si solar cells, J. Non-Cryst. Sol. 137&138 (1991) 1205-1208
8. H. Schmoranzer, A. Mayer and A. Jank, Measurement of the electric potential in silicon solar cells employing an electron-beam tester, Fresenius J. Anal. Chem. 341 (1990) 251-254