Temperature measurement in rapid thermal processing using the acoustic temperature sensor

IEEE Transactions on Semiconductor Manufacturing

Volumn 9, Issue 1, 1996, Pages 115-121

  Lee, Yong Jin ^a   Khuri Yakub, Butrus T ^b   Saraswat, Krishna ^c  

^a CVC Products   (United States)

^b STANFORD UNIVERSITY   (United States)

^c Stanford University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC TRANSDUCERS; ACOUSTIC WAVE TRANSMISSION; SEMICONDUCTOR DEVICE MANUFACTURE; SENSORS; SILICON WAFERS; THERMAL EFFECTS;

ACOUSTIC TEMPERATURE SENSORS; LAMB WAVES; RAPID THERMAL PROCESSING;

TEMPERATURE MEASUREMENT;

EID: 0030083456     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.484291     Document Type: Article

References (8)

1. Y. J. Lee, C. H. Chou, B. T. Khuri-Yakub, and K. C. Saraswat, "Noninvasive process temperature monitoring using laser-acoustic techniques," in 1990 VLSI Technol. Symp., Honolulu, HI, June 5-7, 1990.
2. M. Redwood, "Mechanical waveguides," The Propagation of Acoustic and Ultrasonic Waves in Fluids and Solids With Boundaries. New York: Pergamon, 1960.
3. B. A. Auld, Acoustic Fields and Waves in Solids. New York: Wiley, 1973.
4. I. A. Victorov, "Raleigh and Lamb waves," Physical Theory and Applications. New York: Plenum, 1967.
5. Y. J. Lee, "Temperature measurement in rapid thermal processors using acoustic techniques," Ph.D. dissertation, Department of Electrical Engineering, Stanford University, Stanford, CA, Feb. 1994.
6. H. J. McSkimmin, "Measurement of elastic constants at low temperatures by means of ultrasonic waves - Data for silicon and germanium single crystals, and for fused silica," J. Appl. Phys., vol. 24, no. 8, p. 988, 1953.
7. J. A. Gerber and A. V. Granato, "Theory of the temperature dependence of second-order elastic constants in cubic materials," Phys. Rev., vol. 11, no. 10, p. 3990, 1975.
8. S. Rajagopalan, "Temperature dependence of the nonlinearity constant and ultrasonic attenuation in pure silicon and germanium," J. Appl. Phys., vol. 54, no. 6, p. 3166, 1983.