Surface morphology of GaAs(001) grown by solid- and gas-source molecular beam epitaxy

Surface Science

Volumn 346, Issue 1-3, 1996, Pages 136-144

  Van Nostrand, Joseph E ^a   Chey, S Jay ^a   Cahill, David G ^a   Botchkarev, A E ^a   Morkoc H ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Gallium arsenide; Growth; Low index single crystal surfaces; Molecular beam epitaxy; Scanning tunneling microscopy; Surface structure, morphology, roughness, and topography

Indexed keywords

ARSENIC COMPOUNDS; EPITAXIAL GROWTH; MOLECULAR BEAM EPITAXY; MORPHOLOGY; SCANNING TUNNELING MICROSCOPY; SUBSTRATES; SURFACE ROUGHNESS; SURFACE STRUCTURE; SURFACES; THERMAL EFFECTS;

ARSINE; GAS SOURCE MOLECULAR BEAM EPITAXY; LOW INDEX SINGLE CRYSTAL SURFACES; SOLID SOURCE MOLECULAR BEAM EPITAXY; TOPOGRAPHY;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0030083322     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/0039-6028(95)00939-6     Document Type: Article

References (47)

1. E. Parker, The Technology and Physics of Molecular Beam Epitaxy (Plenum, New York, 1985).
2. H.-J. Gossmann and E.F. Schubert, Crit. Rev. Solid State Mater. Sci. 18 (1993) 1.
3. J. Tersoff, A.W. Denier van der Gon and R.M. Tromp, Phys. Rev. Lett. 72 (1994) 266.
4. P. Larsen and P. Dobson, Reflection High-Energy Electron Diffraction and Reflection Electron Imaging of Surfaces (Plenum, New York, 1988).
5. J.E. Mahan, K.M. Geib, G.Y. Robinson and R.G. Long, J. Vac. Sci. Technol. A 8 (1990) 3692.
6. B. Orschel, G. Oelgart and R. Houdre, Appl. Phys. Lett. 62 (1993) 843.
7. C.A. Warwick and R.F. Kopf, Appl. Phys. Lett. 60 (1992) 386.
8. D. Bimberg, J. Christen, T. Fukunaga, H. Nakashima, D.E. Mars and J.N. Miller, J. Vac. Sci. Technol. B 5 (1987) 1191.
9. C.A. Warwick, W.Y. Jan, A. Ourmazd and T.D. Harris, Appl. Phys. Lett. 56 (1990) 2666.
10. H. Sakaki, T. Noda, K. Hirakawa, M. Tanaka and T. Matsusue, Appl. Phys. Lett. 51 (1987) 1934.
11. S. Fernandez de Avila, J.L. Sanches-Rojas, F. Gonzalez-Sanz, E. Calleja, E. Munoz, P. Hiesinger, K. Kohler and W. Jantz, Appl. Phys. Lett. 64 (1994) 907.
12. M.C. Gallagher, R.H. Prince and R.F. Willis, Surf. Sci. 275 (1992) 31.
13. J. Kim, M.C. Hallagher and R.F. Willis, J. Vac. Sci. Technol. B 11 (1993) 1370.
14. S.L. Skala, J.S. Hubaacek, J.R. Tucker, J.W. Lyding, S.T. Chou and K.-Y. Cheng, Phys. Rev. B 48 (1993) 9138.
15. S.P. Kowalczyk, D.L. Miller, J.R. Waldrop, G.G. Newman and R.W. Grant, J. Vac. Sci. Technol. A 6 (1981) 488.
16. Y.-N. Yang, Y.S. Luo and J.H. Weaver, Appl. Phys. Lett. 61 (1992) 1930.
17. T. Hashizume, Q.K. Xue, J. Zhou, A. Ichimiya and T. Sakurai, Phys. Rev. Lett. 73 (1994) 2208.
18. A.R. Avery, D.M. Holmes, J. Sudijono, T.S. Jones and B.A. Joyce, Surf. Sci. 323 (1995) 91.
19. D.K. Biegelsen, R.D. Bringans, J.E. Northrup and L.-E. Swartz, Phys. Rev. B 41 (1990) 5701.
20. H. Xu, T. Hashizume and T. Sakurai, Jpn. J. Appl. Phys. 32 (1993) 1511.
21. M.D. Pashley, K.W. Haberern, W. Friday, J.M. Woodall and P.D. Kirchner, Phys. Rev. Lett. 60 (1988) 2176.
22. M.D. Pashley, K.W. Haberem and J.M. Woodall, J. Vac. Sci. Technol. B 6 (1988) 1468.
23. M.D. Pashley, K.W. Haberem and R.M. Feenstra, J. Vac. Sci. Technol. B 10 (1992) 1874.
24. V. Bressler-Hill, M. Wassermeier, K. Pond, R. Maboudian, G.A.D. Briggs, P.M. Petroff and W.H. Weinberg, J. Vac. Sci. Technol. B 10 (1992) 1881.
25. J. Sudijono, M.D. Johnson, M.B. Elowitz, C.W. Snyder and B.G. Orr, Surf. Sci. 280 (1993) 247.
26. E.J. Heller and M.G. Lagally, Appl. Phys. Lett. 60 (1992) 2675.
27. T. Ide, A. Yamashita and T. Mizutani, Surf. Sci. 287/288 (1993) 1013.
28. R. Maboudian, V. Bressler-Hill, K. Pond, X.-S. Wang, P.M. Petroff and W.H. Weinberg, Surf. Sci. 302 (1994) L269.
29. M.D. Pashley, Philos. Trans. R. Soc. London A 344 (1993) 533.
30. T. Ide, A. Yamashita and T. Mizutani, Phys. Rev. B 46 (1992) 1905.
31. J. Villain, J. Phys. I, 1 (1991) 19.
32. M.D. Johnson, C. Orme, A.W. Hunt, D. Graff, J. Sudijono, L.M. Sander and B.G. Orr, Phys. Rev. Lett. 72 (1994) 116.
33. M. Siegert and M. Plischke, Phys. Rev. Lett. 73 (1994) 1517.
34. C. Orme, M.D. Johnson, J.L. Sudijono, K.T. Leung and B.G. Orr, Appl. Phys. Lett. 64 (1994) 860.
35. G.W. Smith, A.J. Pidduck, C.R. Whitehouse, J.L. Glasper and J. Spowart, J. Cryst. Growth 127 (1993) 966.
36. J.E. Van Nostrand, S.J. Chey, D.G. Cahill, M.A. Hassan and J.E. Greene, Phys. Rev. Lett. 74 (1995) 1127.
37. M.A. Cotta, R.A. Hamm, S.N.G. Chu, L.R. Harriott and H. Temkin, J. Appl. Phys. 75 (1994) 630.
38. G. Ehrlich and F.G. Hudda, J. Chem. Phys. 44 (1966) 1039.
39. R.L. Schwoebel, J. Appl. Phys. 40 (1969) 614.
40. S.C. Wang and G. Ehrlich, Phys. Rev. Lett, 67 (1991) 2509.
41. J.A. Stroscio, D.T. Pierce, M. Stiles, A. Zangwill and L.M. Sander, unpublished.
42. P. Smilauer and D.D. Vvedensky, Phys. Rev. B 48 (1993) 17603.
43. J. Van Hove and P. Cohen, Appl. Phys. Lett. 47 (1985) 726.
44. T. Kojima, N. Kawai, T. Nakagawa, K. Ohta, T. Sakamoto and M. Kawashima, Appl. Phys. Lett. 47 (1985) 286.
45. R. Heckingbottom, J. Vac. Sci. Technol. B 3 (1985) 572.
46. R. Fischer, J. Klem, T.J. Drummond, R.E. Thorne, W. Kopp, H. Morkoç and A.Y. Cho, J. Appl. Phys. 54 (1983) 2508.
47. B.A. Bansenauer and J.R. Creighton, Surf. Sci. 278 (1992) 317.