Hydrogen flow rate dependence of diamond crystallite size, density and quality in "jet flow" HFCVD employing CH4-H2-O2 gaseous mixture

Solid State Communications

Volumn 97, Issue 7, 1996, Pages 647-650

  Dua, A K ^a   Pruthi, D D ^a   George, V C ^a   Raj, P ^a   Rekha, M A ^a   Roy, A P ^a  

^a BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

A. insulator; A. thin films; B. chemical synthesis; C. scanning electron microscopy; E. inelastic light scattering

Indexed keywords

CHARACTERIZATION; CHEMICAL VAPOR DEPOSITION; FLUID DYNAMICS; HYDROGEN; INSULATING MATERIALS; JETS; LIGHT SCATTERING; METHANE; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); THIN FILMS;

CRYSTALLITE DENSITY; CRYSTALLITE SIZE; GASEOUS MIXTURE; HYDROGEN FLOW RATE; INELASTIC LIGHT SCATTERING; JET FLOW; LASER RAMAN SPECTROSCOPY;

DIAMONDS;

EID: 0030082913     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/0038-1098(95)00611-7     Document Type: Article

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