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Volumn 35, Issue 2 B, 1996, Pages
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Preparation of Ti-Al-N electrode films by pulsed laser ablation for lead-zirconate-titanate film capacitors
a
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Author keywords
[No Author keywords available]
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Indexed keywords
CAPACITORS;
ELECTRIC PROPERTIES;
ELECTRODES;
FERROELECTRIC MATERIALS;
FILM GROWTH;
FILM PREPARATION;
HYSTERESIS;
LASER ABLATION;
LEAD COMPOUNDS;
OXIDATION RESISTANCE;
PULSED LASER APPLICATIONS;
TITANIUM COMPOUNDS;
FERROELECTRIC HYSTERESIS LOOP;
FERROELECTRIC THIN FILMS;
LEAD ZIRCONATE TITANATE FILM CAPACITORS;
PULSED LASER ABLATION;
TITANIUM ALUMINUM NITRIDE ELECTRODE FILM;
THIN FILMS;
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EID: 0030082334
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/JJAP.35.L227 Document Type: Article |
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Times cited : (6)
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References (20)
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