Influence of short circuits on data of contact and via open circuits determined by a novel weave test structure

IEEE Transactions on Semiconductor Manufacturing

Volumn 9, Issue 1, 1996, Pages 27-34

  Hess, Christopher ^a   Weiland, Larg H ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONTACTS; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUIT TESTING; INTEGRATED CIRCUITS;

BOUNDARY PADS; OPEN CIRCUITS; WEAVE TEST STRUCTURE;

SHORT CIRCUIT CURRENTS;

EID: 0030081718     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.484280     Document Type: Article

References (12)

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