All selective MOVPE grown BH-LD's fabricated by the novel self-alignment process

IEEE Photonics Technology Letters

Volumn 8, Issue 2, 1996, Pages 179-181

  Sakata, Y ^a   Delansay, P ^a   Inomoto, Y ^a   Yamaguchi, M ^a   Murakami, T ^a   Hasumi, H ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CURRENTS; ETCHING; HETEROJUNCTIONS; MASKS; METALLORGANIC VAPOR PHASE EPITAXY; OPTICAL WAVEGUIDES; PRESSURE; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES; TEMPERATURE;

INDIUM GALLIUM ARSENIC PHOSPHIDE; SELF ALIGNMENT MASK PATTERNING PROCESS; SEMICONDUCTOR ETCHING;

SEMICONDUCTOR LASERS;

EID: 0030080721     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.484233     Document Type: Article

References (6)

1. T. Kato, T. Sasaki, K. Komatsu and I. Mito, "DFB-LD/modulator integrated light source by bandgap energy controlled selective MOVPE," Electron. Lett., vol. 28, pp. 153-154, 1992.
2. T. Sasaki and I. Mito, "Selective MOVPE growth for photonic integration circuits," Tech. Dig. OFC '93, ThKl, pp. 210-212, 1993.
3. M. Aoki, M. Suzuki, H. Sano, T. Kawano, T. Ido, T. Taniwatari, K. Uomi, and A. Takai, "InGaAs/InGaAsP MQW electroabsorption modulator integrated with a DFB laser fabricated by band-gap energy control selective area MOCVD," IEEE J. Quantum Electron., vol. 29, pp. 2088-2096, 1993.
4. S. Takano, T. Morimoto, T. Nakamura, H. Hasumi, M. Yamaguchi, T. Sasaki, and I. Mito, "1.55 μm wavelength-tunable MQW-DBR-LD's employing bandgap energy control in all selective MOVPE growth," Tech. Dig. ECOC '92, TuB 5.3, pp. 177-180, 1992.
5. S. Kitamura, T. Sasaki, K. Komatsu, and M. Kitamura, "Extremely small active stripe laser diodes (EXSAS-LD's) for 17 channel low threshold array," Electron. Lett., vol. 30, pp. 1487-1488, 1994.
6. T. Sasaki, M. Kitamura, and I. Mito, "Selective metalorganic vapor phase epitaxial growth of InGaAsP/InP layers with bandgap energy control in InGaAs/InGaAsP multiple-quantum well structures," J. Crystal Growth, vol. 132, pp. 435-443, 1993.