Novel plasma polymerization system using a d.c. glow discharge

Thin Solid Films

Volumn 273, Issue 1-2, 1996, Pages 258-262

  Suwa, Toshihiro ^a   Jikei, Mitsutoshi ^a   Kakimoto, Masa Aki ^a   Imai, Yoshio ^a   Tanaka, Akira ^b   Yoneda, Katsumi ^b  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b Nippon Laser Electronics Laboratory   (Japan)

Author keywords

Glow discharge; Optical spectroscopy; Organic substances; Plasma processing and deposition

Indexed keywords

CHEMICAL ANALYSIS; CONTACT ANGLE; ELECTRON SPECTROSCOPY; FLUOROCARBONS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GLOW DISCHARGES; HYDROCARBONS; ORGANIC COMPOUNDS; PLASMA APPLICATIONS; RAMAN SPECTROSCOPY; STRUCTURE (COMPOSITION); THIN FILMS;

CHEMICAL STRUCTURE; CONTACT ANGLE MEASUREMENTS; HYDROGEN FREE CARBON FILMS; PLASMA POLYMERIZATION;

POLYMERIZATION;

EID: 0030079849     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)07000-1     Document Type: Article

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