Surface morphologies of sputter-deposited aluminum films studied using a high-resolution phase-measuring laser interferometric microscope

Applied Optics

Volumn 35, Issue 4, 1996, Pages 701-707

  Furukawa, Masakazu ^a   Yamamoto, Yoshito ^a   Ikakura, Hiroshi ^a   Tanaka, Nobuo ^b   Hashimoto, Masayuki ^b   Sano, Atsushi ^c   Shingubara, Shoso ^c  

^a CANON INC   (Japan)

^b NS Semiconductor Co Ltd   (Japan)

^c HIROSHIMA UNIVERSITY   (Japan)

Author keywords

Grain size; Laser interferometric microscope; Microroughness; Polycrystalline film; Surface morphology

Indexed keywords

ALUMINUM; ARGON; GRAIN SIZE AND SHAPE; HELIUM NEON LASERS; MICROSCOPES; MORPHOLOGY; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; SURFACES; THERMAL EFFECTS; TUNGSTEN;

LASER INTERFEROMETRIC MICROSCOPE; REFLECTIVITY; SKEWNESS;

METALLIC FILMS;

EID: 0030079681     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.35.000701     Document Type: Article

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