Dynamics and morphology of cracks in silicon nitride films: a molecular dynamics study on parallel computers

Materials Research Society Symposium - Proceedings

Volumn 409, Issue , 1996, Pages 11-22

  Nakano, Aiichiro ^a   Kalia, Rajiv K ^a   Vashishta, Priya ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CRACK PROPAGATION; CRACKS; CRYSTALLINE MATERIALS; FILMS; FRACTURE; MOLECULAR DYNAMICS; MORPHOLOGY; PARALLEL PROCESSING SYSTEMS; POROUS MATERIALS; SILICA; SURFACES;

KINETIC ROUGHENING; PORE PERCOLATION;

SILICON NITRIDE;

EID: 0029780016     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (25)