Titanium germanosilicide phase formation during the Ti-Si1-xGex solid phase reactions

Materials Research Society Symposium - Proceedings

Volumn 402, Issue , 1996, Pages 405-410

  Aldrich, D B ^a   Chen, Y L ^a   Sayers, D E ^a   Nemanich, R J ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPOSITION; CRYSTAL GROWTH; INTERFACES (MATERIALS); PHASE TRANSITIONS; SILICON ALLOYS; TEMPERATURE; THIN FILMS;

POLYMORPHIC TRANSFORMATIONS; SILICON GERMANIUM ALLOY; SOLID PHASE REACTIONS; TITANIUM GERMANOSILICIDE;

TITANIUM COMPOUNDS;

EID: 0029779045     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)