Electron cyclotron resonance plasma etching of native TiO2 on TiN

Journal of the Electrochemical Society

Volumn 143, Issue 1, 1996, Pages 264-271

  Day, Mary E ^a   Delfino, Michelangelo ^a  

^a VARIAN MEDICAL SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; ETCHING; GRAIN BOUNDARIES; ION BOMBARDMENT; OXYGEN; PLASMAS; SECONDARY ION MASS SPECTROMETRY; SURFACES; TITANIUM OXIDES; X RAY PHOTOELECTRON SPECTROSCOPY;

ANGLE RESOLVE X RAY PHOTOEMISSION; ELECTRON CYCLOTRON RESONANCE PLASMA ETCHING; ION ENERGY; STATIC SECONDARY ION MASS SPECTROMETRY; X RAY FLUORESCENCE;

TITANIUM NITRIDE;

EID: 0029777784     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1836419     Document Type: Article

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