Micromachined microdevices and microinstruments

Microelectronic Engineering

Volumn 30, Issue 1-4, 1996, Pages 563-564

  MacDonald, N C ^a   Adams, S G ^a   Ayon, A A ^a   Bohringer, K F ^a   Chen, L Y ^a   Das, J H ^a   Haronian, D ^a   Hofmann, W ^a   Huang, X T ^a   Jazairy, A ^a   Mihailovich, R E ^a   Miller, S A ^a   Ogo, I ^a   Prasad, R ^a   Reed, B W ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ASPECT RATIO; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; PERFORMANCE; PRODUCT DESIGN; REACTIVE ION ETCHING; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTING SILICON; SINGLE CRYSTALS;

MICROINSTRUMENTS; MICROMACHINED MICRODEVICES; SELECTIVE TUNGSTEN MULTIPLE LEVEL PLANAR PROCESS; SINGLE CRYSTAL SILICON REACTIVE ETCHING AND METALLIZATION;

MICROELECTRONIC PROCESSING;

EID: 0029775434     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-9317(95)00310-X     Document Type: Article

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