Semiconductor factory automation

Solid State Technology

Volumn 39, Issue 1, 1996, Pages 89-96

  Weiss, Mitchell ^a,b,c  

^a PRI Automation   (United States)

^b Architecture Machine Group

^c ProgramMation Inc

Author keywords

[No Author keywords available]

Indexed keywords

COSTS; ELECTRONICS INDUSTRY; FLEXIBLE MANUFACTURING SYSTEMS; MATHEMATICAL MODELS; PRODUCTIVITY; SEMICONDUCTOR DEVICE MANUFACTURE;

BASELINE FAB LAYOUT; FACTORY AUTOMATION MODELS; FLEXIBLE FACTORY AUTOMATION; OPERATING COSTS; SEMICONDUCTOR FACTORY AUTOMATION; SEMICONDUCTOR INDUSTRY;

FACTORY AUTOMATION;

EID: 0029774244     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (7)

1. Jeff Davis, Mitchel Weiss, 'Addressing automated materials handing in an existing wafer fab,' Semiconductor Intemational (June 1995).
2. Livingston, Jack et al., 'Are minienvironments more economical for new construction,' Micro (March 1995).
3. 'Strategic future fab study,' Fluor Deriel (June 1994).
4. H. Gath, R. Simon, 'Minienvironment systems for advanced world class fabs,' Swiss Contamination Control, 3 (1995).
5. Mitchel Weiss, 'Using flexble factory automation systems to alow aternative fab layouts,' Semicon Southwest (Oct. 1995).
6. SEMATECH study.
7. P. Muler, et al., 'The Norcross Project: Comparing manual and robotic water handing using miniervironments in a degraded cleanroom,' Microcontamination (Sept. 1994).