Electrical test structures replicated in silicon-on-insulator material

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2725, Issue , 1996, Pages 659-676

  Cresswell, Michael W ^a   Sniegowski, Jeffry J ^a   Ghoshtagore, Rathindra N ^a   Allen, Richard A ^a   Linholm, Loren W ^a   Villarrubia, John S ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRICAL LINEWIDTHS;

CALIBRATION; DESIGN; DISTANCE MEASUREMENT; ELECTRIC VARIABLES MEASUREMENT; ELECTRON BEAMS; SEMICONDUCTING SILICON; SINGLE CRYSTALS; TESTING; TRANSMISSION ELECTRON MICROSCOPY;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0029773090     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)