Removable organic antireflection coating

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2724, Issue , 1996, Pages 738-746

  Sturtevant, John L ^a   Insalaco, Linda J ^a   Flaim, Tony ^a   Krishnamurthy, Vandana ^a   Meador, James D ^a   Petersen, John S ^a   Eckert, Andy ^a  

^a SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSLINKING; ETCHING; MASKS; ORGANIC COMPOUNDS; PERFORMANCE; PHOTORESISTS; PLASMA DEVICES; POLYMERS; THERMAL EFFECTS; THICKNESS MEASUREMENT;

BILAYERS; ULTRAVIOLET EXPOSURES;

ANTIREFLECTION COATINGS;

EID: 0029773088     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.241872     Document Type: Conference Paper

References (8)