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Volumn , Issue , 1996, Pages 70-75
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Preparation and characterization of cubic boron nitride and carbon nitride films
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Author keywords
[No Author keywords available]
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Indexed keywords
CARBON INORGANIC COMPOUNDS;
CHARACTERIZATION;
CHEMICAL VAPOR DEPOSITION;
COATINGS;
CRYSTALLINE MATERIALS;
CUBIC BORON NITRIDE;
FILM PREPARATION;
MECHANICAL PROPERTIES;
NITROGEN;
CUBIC BORON NITRIDE FILMS;
PHYSICAL VAPOR DEPOSITION;
SUPERHARD CARBON NITRIDE PHASE;
THIN FILMS;
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EID: 0029772710
PISSN: 12660167
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (4)
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References (40)
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