Light-scattering-based micrometrology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2775, Issue , 1996, Pages 251-262

  Bischoff, Joerg ^a   Baumgart, Joerg W ^a   Bauer, Joachim J ^a   Truckenbrodt, Horst ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CONCENTRATION PROFILES; MICROLITHOGRAPHY; MICROMETROLOGY;

DATA PROCESSING; INVERSE PROBLEMS; LITHOGRAPHY; REGRESSION ANALYSIS; SILICON;

LIGHT SCATTERING;

EID: 0029769983     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)