Laser-induced reactions in a deep UV resist system: studied with picosecond infrared spectroscopy

Materials Research Society Symposium - Proceedings

Volumn 397, Issue , 1996, Pages 661-666

  Lippert, T ^a   Koskelo, A ^a   Stoutland, P O ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BLEACHING; INFRARED SPECTROSCOPY; IRRADIATION; LASER ABLATION; LASER APPLICATIONS; LASER PULSES; PHOTOCHEMICAL REACTIONS; PHOTORESISTS;

DECONVOLUTION TECHNIQUES; DIAZO MELDRUMS ACID; DIAZOKETONES; KETENE; PICOSECOND INFRARED SPECTROSCOPY; WOLFF REARRANGEMENT;

ORGANIC COMPOUNDS;

EID: 0029767082     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)