High-accuracy overlay measurements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2725, Issue , 1996, Pages 320-330

  Silver, Rick M ^a   Potzick, James E ^a   Scire, Fredric ^a   Larrabee, Robert D ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

OVERLAY METROLOGY; STEPPER TECHNIQUES;

ALIGNMENT; CALIBRATION; ELECTRIC FIELDS; MONITORING; PHASE SHIFT; PHOTOLITHOGRAPHY; PRECISION ENGINEERING; PROCESS CONTROL;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0029766719     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)