Aerostatic precision glass bearing with an integrated polygonal mirror for scanning: a new method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2775, Issue , 1996, Pages 619-628

  Risse, Stefan ^a   Guyenot, Volker ^a  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

POLYGONAL MIRRORS; ROUNDNESS ERRORS;

ERROR ANALYSIS; GLASS; MIRRORS; OPTIMIZATION; PERFORMANCE; PRECISION ENGINEERING; SCANNING;

BEARINGS (MACHINE PARTS);

EID: 0029766248     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)