Microscopic evaluation of the surface structure of OMVPE deposited α-GaN epilayers

Materials Research Society Symposium - Proceedings

Volumn 395, Issue , 1996, Pages 381-386

  Rohrer, G S ^a   Payne, J ^a   Qian, W ^a   Skowronski, M ^a   Doverspike, K ^a   Rowland, L B ^a   Gaskill, D K ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; DISLOCATIONS (CRYSTALS); FILM GROWTH; METALLORGANIC VAPOR PHASE EPITAXY; MICROSCOPIC EXAMINATION; OPTICAL MICROSCOPY; SEMICONDUCTING FILMS; SURFACE STRUCTURE; SURFACES;

BURGERS VECTORS; EPILAYERS; GALLIUM NITRIDE; SCANNING FORCE MICROSCOPY; SPIRAL GROWTH;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0029765291     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)