Approaches explored for producing a variety of ion-assisted deposited thin film coatings using an end-Hall ion source

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2776, Issue , 1996, Pages 114-125

  Fulton, Michael L ^a   Heshmaty Manesh, Davood ^a   Mitchell, Raymond ^a  

^a Singapore   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

COATING TECHNIQUES; HALL EFFECT DEVICES; ION SOURCES; OPTICAL FILTERS; THIN FILMS;

HALL ION SOURCES; ION ASSISTED DEPOSITION; OPTICALLY STABLE FILMS; THIN FILM COATINGS;

OPTICAL COATINGS;

EID: 0029765173     PISSN: None     EISSN: None     Source Type: None    
DOI: 10.1117/12.246808     Document Type: Conference Paper

References (13)