Design and optimization of batch-fabricated rotative piezomotors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2717, Issue , 1996, Pages 565-575

  Le Moal, P ^a   Minotti, Patrice ^a   Ferreira, Antoine ^a   Cusin, P ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

PIEZOMOTORS; STATOR-ROTOR INTERFACES; ULTRASONIC MICROMETERS;

DESIGN; FABRICATION; KINEMATICS; MICROMETERS; MODELS; OPTIMIZATION; ROTORS; ULTRASONIC DEVICES;

PIEZOELECTRIC DEVICES;

EID: 0029764739     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)