Analysis of defects in multilayers through photothermal deflection technique

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2775, Issue , 1996, Pages 370-379

  Bertolotti, Mario ^a   Li Voti, R ^a   Sibilia, Concita ^a   Liakhou, G L ^a  

^a SAPIENZA UNIVERSITY OF ROME   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BURIED AIR DEFECTS; PHOTOTHERMAL DEFLECTION; THERMAL WAVE INTERFEROMETRY;

AIR; DEFECTS; MULTILAYERS; THERMAL EFFECTS;

INTERFEROMETRY;

EID: 0029763823     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)