Thermometry of gas layers in thermal plasma CVD by pulsed-laser Rayleigh scattering

Applied Physics B: Lasers and Optics

Volumn 62, Issue 1, 1996, Pages 71-75

  Larjo, J ^a   Vattulainen, J ^a   Hernberg, R ^a  

^a TAMPERE UNIVERSITY OF TECHNOLOGY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SPECTROSCOPY; BOUNDARY LAYERS; CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; EMISSION SPECTROSCOPY; GASES; PLASMAS; RAYLEIGH SCATTERING; TEMPERATURE MEASUREMENT; THERMAL GRADIENTS; THERMOMETERS;

ATOMIC EMISSION SPECTROSCOPY; GAS LAYERS; LASER SHEET MEASUREMENTS; POINT BY POINT MEASUREMENTS; PULSED LASER RAYLEIGH SCATTERING THERMOMETRY; THERMAL INDUCTION PLASMA; THERMOMETRY;

PULSED LASER APPLICATIONS;

EID: 0029760754     PISSN: 09462171     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF01081250     Document Type: Article

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