Surface characterization of aluminum nitride thin films formed by nitrogen implantation

Vide: Science, Technique et Applications

Volumn , Issue , 1996, Pages 134-136

  Arranz, A ^a   Palacio, C ^a  

^a UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ALUMINUM COMPOUNDS; CHARACTERIZATION; COATINGS; ION IMPLANTATION; X RAY PHOTOELECTRON SPECTROSCOPY;

ALUMINUM NITRIDE THIN FILMS; ANGLE RESOLVED PHOTOELECTRON SPECTROSCOPY; COATING ADHESION; NITROGEN IMPLANTATION;

THIN FILMS;

EID: 0029756901     PISSN: 12660167     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)