Characterization of micropipes and other defect structures in 6H-SiC through fluorescence microscopy

Materials Research Society Symposium - Proceedings

Volumn 406, Issue , 1996, Pages 561-566

  Vetter, W M ^a   Dudley, M ^a   Wong, T F ^a   Fredrich, J T ^a  

^a STONY BROOK UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL STRUCTURE; DISLOCATIONS (CRYSTALS); DYES; MICROSCOPIC EXAMINATION; OPTICAL MICROSCOPY; SINGLE CRYSTALS;

FLUORESCENCE MICROSCOPY; FLUORESCENT DYE; LASER SCANNING CONFOCAL MICROSCOPY; MICROPIPES; OPTICAL MICROGRAPHS; SYNCHROTRON WHITE BEAM X RAY TOPOGRAPHY; VOIDS;

SILICON CARBIDE;

EID: 0029756575     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)