Implementation of a WLR - program into a production line

International Integrated Reliability Workshop Final Report

Volumn , Issue , 1996, Pages 49-54

  Papp, A ^a   Bieringer, F ^a   Koch, D ^a   Kammer, H ^a   Kohlhase, A ^a   Lill, A ^a   Preussger, A ^a   Schlemm, A ^a   Schneegans, M ^a  

^a SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SOFTWARE; GATES (TRANSISTOR); HOT CARRIERS; INTEGRATED CIRCUIT TESTING; METALLIZING; RELIABILITY;

GATE OXIDE INTEGRITY; HOT CARRIER INJECTION IMMUNITY; METALLIZATION STABILITY; WAFER LEVEL RELIABILITY PROGRAM;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0029756032     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)