Si and Zn doping of GaP grown by OMVPE using tertiarybutylphosphine

Journal of Crystal Growth

Volumn 158, Issue 1-2, 1996, Pages 49-52

  Wang, Xue Lun ^a,b   Wakahara, Akihiro ^b   Sasaki, Akio ^b  

^a ELECTROTECHNICAL LABORATORY   (Japan)

^b KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MOLECULAR BEAM EPITAXY; PHOSPHORUS COMPOUNDS; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTING ZINC COMPOUNDS; SEMICONDUCTOR DOPING; SILICON COMPOUNDS;

GAS SOURCE MOLECULAR BEAM EPITAXY; HALL MOBILITY; PHOSPHINE HOLE CONCENTRATION; TERTIARYBUTYLPHOSPHINE;

METALLORGANIC VAPOR PHASE EPITAXY;

EID: 0029755857     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/0022-0248(95)00341-X     Document Type: Article

References (19)

1. A. Sasaki, M. Kasu, T. Yamamoto and S. Noda, Jpn. J. Appl. Phys. 28 (1989) L1249.
2. X.L. Wang, A. Wakahara and A. Sasaki, Appl. Phys. Lett. 62 (1993) 888.
3. A. Morri, I. Ohno, A. Kanda, K. Arai, K. Tokudome, K. Hara, J. Yoshino and H. Kukimoto, Jpn. J. Appl. Phys. 30 (1991) L1244.
4. H. Asahi, K. Asami, T. Watanabe, S.J. Yu, T. Kaneko, S. Emura and S. Gonda, Appl. Phys. Lett. 58 (1991) 1407.
5. G.B. Stringfellow, Organometallic Vapor Phase Epitaxy: Theory and Practice (Academic Press, New York, 1989).
6. A. Wakahara, X.L. Wang and A. Sasaki, J. Crystal Growth 124 (1992) 118.
7. X.L. Wang, A. Wakahara and A. Sasaki, J. Crystal Growth 129 (1993) 289.
8. X.L. Wang, A. Wakahara and A. Sasaki, Appl. Phys. Lett. 64 (1994) 2016.
9. J.N. Baillargeon, K.Y. Chen and K.C. Hsieh, J. Crystal Growth 105 (1990) 106.
10. R.M. Biefeld, J. Crystal Growth 56 (1982) 382.
11. K. Adomi, N. Noto, A. Nakamura and T. Takenaka, J. Crystal Growth 124 (1992) 570.
12. J.M. Redwing, T.F. Kuech, D. Saulys and D.F. Gaines, J. Crystal Growth 135 (1994) 423.
13. T. Kikkawa, H. Tanaka and T. Komeno, J. Electron. Mater. 21 (1992) 305.
14. T. Ohori, M. Takechi, M. Suzuki, M. Takikawa and J. Komeno, J. Crystal Growth 93 (1988) 905.
15. M. Suzuki, M. Ishikawa, K. Itaya, Y. Nishikawa, G. Hatakoshi, Y. Kokubun, J. Nishizawa and Y. Oyama, J. Crystal Growth 115 (1991) 498.
16. M. Kondo, C. Anayama, N. Okada, H. Sekiguchi, K. Domen and T. Tanahasi, J. Appl. Phys. 76 (1994) 914.
17. O. Madelung, Ed., Landolt-Börnstein, Numerical Data and Functional Relationships in Science and Technology, Vol. 17a (Springer, Berlin, 1982).
18. S.H. Li, N.I. Buchan, C.A. Larsen and G.B. Stringfellow, J. Crystal Growth 96 (1989) 906.
19. H.C. Casey, Jr., F. Ermani and K.B. Wolfstirn, J. Appl. Phys. 40 (1969) 2945.