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Volumn 272, Issue 2, 1996, Pages 386-398

Atomistic aspects of diffusion and growth on the Si and Ge (111) surfaces

Author keywords

Diffusion; Germanium; Growth mechanism; Silicon

Indexed keywords

COMPUTER SIMULATION; DIFFUSION; FILM GROWTH; INTERFACES (MATERIALS); MATHEMATICAL MODELS; MONOLAYERS; MONTE CARLO METHODS; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON; THIN FILMS;

EID: 0029755809     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(95)06961-5     Document Type: Article
Times cited : (24)

References (86)
  • 1
    • 35949011121 scopus 로고
    • Y.-W. Mo, B.S. Swartzentruber, R. Kariotis, M.B. Webb and M.G. Lagally, Phys. Rev. Lett., 63 (1989) 2393; Y.W. Mo, J. Kleiner, M.B. Webb and M.G. Lagally, Phys. Rev. Lett., 67 (1991) 1998; J.J. de Miguel, C.E. Aumann, R. Kariotis and M.G. Lagally, Phys. Rev. Lett., 67 (1991) 2830; X. Chen, F. Wu, Z. Zhang and M.G. Lagally, Phys. Rev. Lett., 73 (1994) 850.
    • (1989) Phys. Rev. Lett. , vol.63 , pp. 2393
    • Mo, Y.-W.1    Swartzentruber, B.S.2    Kariotis, R.3    Webb, M.B.4    Lagally, M.G.5
  • 2
    • 3342968424 scopus 로고
    • Y.-W. Mo, B.S. Swartzentruber, R. Kariotis, M.B. Webb and M.G. Lagally, Phys. Rev. Lett., 63 (1989) 2393; Y.W. Mo, J. Kleiner, M.B. Webb and M.G. Lagally, Phys. Rev. Lett., 67 (1991) 1998; J.J. de Miguel, C.E. Aumann, R. Kariotis and M.G. Lagally, Phys. Rev. Lett., 67 (1991) 2830; X. Chen, F. Wu, Z. Zhang and M.G. Lagally, Phys. Rev. Lett., 73 (1994) 850.
    • (1991) Phys. Rev. Lett. , vol.67 , pp. 1998
    • Mo, Y.W.1    Kleiner, J.2    Webb, M.B.3    Lagally, M.G.4
  • 3
    • 0004773189 scopus 로고
    • Y.-W. Mo, B.S. Swartzentruber, R. Kariotis, M.B. Webb and M.G. Lagally, Phys. Rev. Lett., 63 (1989) 2393; Y.W. Mo, J. Kleiner, M.B. Webb and M.G. Lagally, Phys. Rev. Lett., 67 (1991) 1998; J.J. de Miguel, C.E. Aumann, R. Kariotis and M.G. Lagally, Phys. Rev. Lett., 67 (1991) 2830; X. Chen, F. Wu, Z. Zhang and M.G. Lagally, Phys. Rev. Lett., 73 (1994) 850.
    • (1991) Phys. Rev. Lett. , vol.67 , pp. 2830
    • De Miguel, J.J.1    Aumann, C.E.2    Kariotis, R.3    Lagally, M.G.4
  • 4
    • 12044259367 scopus 로고
    • Y.-W. Mo, B.S. Swartzentruber, R. Kariotis, M.B. Webb and M.G. Lagally, Phys. Rev. Lett., 63 (1989) 2393; Y.W. Mo, J. Kleiner, M.B. Webb and M.G. Lagally, Phys. Rev. Lett., 67 (1991) 1998; J.J. de Miguel, C.E. Aumann, R. Kariotis and M.G. Lagally, Phys. Rev. Lett., 67 (1991) 2830; X. Chen, F. Wu, Z. Zhang and M.G. Lagally, Phys. Rev. Lett., 73 (1994) 850.
    • (1994) Phys. Rev. Lett. , vol.73 , pp. 850
    • Chen, X.1    Wu, F.2    Zhang, Z.3    Lagally, M.G.4
  • 5
    • 3743061510 scopus 로고
    • X.-S. Wang, J.L. Goldberg, N.C. Bartelt, T.L. Einstein and E.D. Williams, Phys. Rev. Lett., 65 (1990) 2430; J. Wei, X.-S. Wang, J.L. Goldberg, N.C. Bartelt and E.D. Williams, Phys. Rev. Lett., 68 (1992) 3885; E.D. Williams and N.C. Bartelt, Science, 251 (1991) 393; E.D. Williams, Surface Sci., 209/300 (1994) 502; E.D. Williams, R.J. Phaneuf, Jian Wei, N.C. Bartelt and T.L. Einstein, Surf. Sci., 294 (1993) 219.
    • (1990) Phys. Rev. Lett. , vol.65 , pp. 2430
    • Wang, X.-S.1    Goldberg, J.L.2    Bartelt, N.C.3    Einstein, T.L.4    Williams, E.D.5
  • 6
    • 3342974842 scopus 로고
    • X.-S. Wang, J.L. Goldberg, N.C. Bartelt, T.L. Einstein and E.D. Williams, Phys. Rev. Lett., 65 (1990) 2430; J. Wei, X.-S. Wang, J.L. Goldberg, N.C. Bartelt and E.D. Williams, Phys. Rev. Lett., 68 (1992) 3885; E.D. Williams and N.C. Bartelt, Science, 251 (1991) 393; E.D. Williams, Surface Sci., 209/300 (1994) 502; E.D. Williams, R.J. Phaneuf, Jian Wei, N.C. Bartelt and T.L. Einstein, Surf. Sci., 294 (1993) 219.
    • (1992) Phys. Rev. Lett. , vol.68 , pp. 3885
    • Wei, J.1    Wang, X.-S.2    Goldberg, J.L.3    Bartelt, N.C.4    Williams, E.D.5
  • 7
    • 0001350626 scopus 로고
    • X.-S. Wang, J.L. Goldberg, N.C. Bartelt, T.L. Einstein and E.D. Williams, Phys. Rev. Lett., 65 (1990) 2430; J. Wei, X.-S. Wang, J.L. Goldberg, N.C. Bartelt and E.D. Williams, Phys. Rev. Lett., 68 (1992) 3885; E.D. Williams and N.C. Bartelt, Science, 251 (1991) 393; E.D. Williams, Surface Sci., 209/300 (1994) 502; E.D. Williams, R.J. Phaneuf, Jian Wei, N.C. Bartelt and T.L. Einstein, Surf. Sci., 294 (1993) 219.
    • (1991) Science , vol.251 , pp. 393
    • Williams, E.D.1    Bartelt, N.C.2
  • 8
    • 3743061510 scopus 로고
    • X.-S. Wang, J.L. Goldberg, N.C. Bartelt, T.L. Einstein and E.D. Williams, Phys. Rev. Lett., 65 (1990) 2430; J. Wei, X.-S. Wang, J.L. Goldberg, N.C. Bartelt and E.D. Williams, Phys. Rev. Lett., 68 (1992) 3885; E.D. Williams and N.C. Bartelt, Science, 251 (1991) 393; E.D. Williams, Surface Sci., 209/300 (1994) 502; E.D. Williams, R.J. Phaneuf, Jian Wei, N.C. Bartelt and T.L. Einstein, Surf. Sci., 294 (1993) 219.
    • (1994) Surface Sci. , vol.209-300 , pp. 502
    • Williams, E.D.1
  • 9
    • 0027657603 scopus 로고
    • X.-S. Wang, J.L. Goldberg, N.C. Bartelt, T.L. Einstein and E.D. Williams, Phys. Rev. Lett., 65 (1990) 2430; J. Wei, X.-S. Wang, J.L. Goldberg, N.C. Bartelt and E.D. Williams, Phys. Rev. Lett., 68 (1992) 3885; E.D. Williams and N.C. Bartelt, Science, 251 (1991) 393; E.D. Williams, Surface Sci., 209/300 (1994) 502; E.D. Williams, R.J. Phaneuf, Jian Wei, N.C. Bartelt and T.L. Einstein, Surf. Sci., 294 (1993) 219.
    • (1993) Surf. Sci. , vol.294 , pp. 219
    • Williams, E.D.1    Phaneuf, R.J.2    Wei, J.3    Bartelt, N.C.4    Einstein, T.L.5
  • 10
  • 11
    • 0000334925 scopus 로고
    • E. Ganz, S.K. Theiss, I.-S. Hwang and J. Golovchenko, Phys. Rev. Lett., 68 (1992) 1567; I.-S. Hwang and J. Golovchenko, Science, 258 (1992) 1119; I.-S. Hwang and J. Golovchenko, Phys. Rev. Lett., 71 (1993) 255.
    • (1992) Science , vol.258 , pp. 1119
    • Hwang, I.-S.1    Golovchenko, J.2
  • 12
    • 3342964544 scopus 로고
    • E. Ganz, S.K. Theiss, I.-S. Hwang and J. Golovchenko, Phys. Rev. Lett., 68 (1992) 1567; I.-S. Hwang and J. Golovchenko, Science, 258 (1992) 1119; I.-S. Hwang and J. Golovchenko, Phys. Rev. Lett., 71 (1993) 255.
    • (1993) Phys. Rev. Lett. , vol.71 , pp. 255
    • Hwang, I.-S.1    Golovchenko, J.2
  • 15
    • 0043215642 scopus 로고
    • A.W. Denier van der Gon and R.M. Tromp, Phys. Rev. Lett., 69 (1992) 3519; R.M. Tromp and M.C. Reuter, Phys. Rev. Lett., 68 (1992) 954, 820; N.C. Bartelt, R.M. Tromp and E.D. Williams, Phys. Rev. Lett., 73 (1994) 1656.
    • (1992) Phys. Rev. Lett. , vol.69 , pp. 3519
    • Denier Van Der Gon, A.W.1    Tromp, R.M.2
  • 16
    • 0011123920 scopus 로고
    • A.W. Denier van der Gon and R.M. Tromp, Phys. Rev. Lett., 69 (1992) 3519; R.M. Tromp and M.C. Reuter, Phys. Rev. Lett., 68 (1992) 954, 820; N.C. Bartelt, R.M. Tromp and E.D. Williams, Phys. Rev. Lett., 73 (1994) 1656.
    • (1992) Phys. Rev. Lett. , vol.68 , pp. 954
    • Tromp, R.M.1    Reuter, M.C.2
  • 17
    • 0000904494 scopus 로고
    • A.W. Denier van der Gon and R.M. Tromp, Phys. Rev. Lett., 69 (1992) 3519; R.M. Tromp and M.C. Reuter, Phys. Rev. Lett., 68 (1992) 954, 820; N.C. Bartelt, R.M. Tromp and E.D. Williams, Phys. Rev. Lett., 73 (1994) 1656.
    • (1994) Phys. Rev. Lett. , vol.73 , pp. 1656
    • Bartelt, N.C.1    Tromp, R.M.2    Williams, E.D.3
  • 18
    • 0026861472 scopus 로고
    • R.J. Phaneuf, N.C. Bartelt, E.D. Williams, W. Swiech and E. Bauer, Surf. Sci., 268 (1992) 227; R.J. Phaneuf, N.C. Bartelt, E.D. Williams, W. Swiech and E. Bauer, Phys. Rev. Lett., 71 (1993) 2284; N.C. Bartelt, J.L. Goldberg, T.L. Einstein, E.D. Williams, J.C. Heyraud and J.J. Metois, Phys. Rev. B, 48 (1993) 15453.
    • (1992) Surf. Sci. , vol.268 , pp. 227
    • Phaneuf, R.J.1    Bartelt, N.C.2    Williams, E.D.3    Swiech, W.4    Bauer, E.5
  • 19
    • 0000035969 scopus 로고
    • R.J. Phaneuf, N.C. Bartelt, E.D. Williams, W. Swiech and E. Bauer, Surf. Sci., 268 (1992) 227; R.J. Phaneuf, N.C. Bartelt, E.D. Williams, W. Swiech and E. Bauer, Phys. Rev. Lett., 71 (1993) 2284; N.C. Bartelt, J.L. Goldberg, T.L. Einstein, E.D. Williams, J.C. Heyraud and J.J. Metois, Phys. Rev. B, 48 (1993) 15453.
    • (1993) Phys. Rev. Lett. , vol.71 , pp. 2284
    • Phaneuf, R.J.1    Bartelt, N.C.2    Williams, E.D.3    Swiech, W.4    Bauer, E.5
  • 22
    • 6144258766 scopus 로고
    • M. Copel, M.C. Reuter, M. Horn von Hoegen and R.M. Tromp, Phys. Rev. B, 42 (1990) 11682; M. Horn-von Hoegen, F.K. LeGoues, M. Copel, M.C. Reuter and R.M. Tromp, Phys. Rev. Lett., 67 (1991) 1130; J. Falta, M. Copel, F.K. LeGoues and R.M. Tromp, Appl. Phys. Lett., 62 (1993) 2962.
    • (1990) Phys. Rev. B , vol.42 , pp. 11682
    • Copel, M.1    Reuter, M.C.2    Horn Von Hoegen, M.3    Tromp, R.M.4
  • 23
  • 24
    • 21544470327 scopus 로고
    • M. Copel, M.C. Reuter, M. Horn von Hoegen and R.M. Tromp, Phys. Rev. B, 42 (1990) 11682; M. Horn-von Hoegen, F.K. LeGoues, M. Copel, M.C. Reuter and R.M. Tromp, Phys. Rev. Lett., 67 (1991) 1130; J. Falta, M. Copel, F.K. LeGoues and R.M. Tromp, Appl. Phys. Lett., 62 (1993) 2962.
    • (1993) Appl. Phys. Lett. , vol.62 , pp. 2962
    • Falta, J.1    Copel, M.2    LeGoues, F.K.3    Tromp, R.M.4
  • 30
    • 0011919902 scopus 로고
    • C. Roland and G.H. Gilmer, Phys. Rev. Lett., 67 (1991) 3188; Phys. Rev. B, 46 (1992) 13428; Phys. Rev. B, 46 (1992) 13437.
    • (1991) Phys. Rev. Lett. , vol.67 , pp. 3188
    • Roland, C.1    Gilmer, G.H.2
  • 31
    • 35949006368 scopus 로고
    • C. Roland and G.H. Gilmer, Phys. Rev. Lett., 67 (1991) 3188; Phys. Rev. B, 46 (1992) 13428; Phys. Rev. B, 46 (1992) 13437.
    • (1992) Phys. Rev. B , vol.46 , pp. 13428
  • 32
    • 0000246616 scopus 로고
    • C. Roland and G.H. Gilmer, Phys. Rev. Lett., 67 (1991) 3188; Phys. Rev. B, 46 (1992) 13428; Phys. Rev. B, 46 (1992) 13437.
    • (1992) Phys. Rev. B , vol.46 , pp. 13437
  • 34
    • 0342641984 scopus 로고
    • Z. Zhang, Y.T. Lu and H. Metiu, Surf. Sci., 80 (1991) 1248; Phys. Rev. B, 46 (1992) 1917.
    • (1992) Phys. Rev. B , vol.46 , pp. 1917
  • 36
    • 30244500637 scopus 로고
    • D. Srivastava, B.J. Garrison and D.W. Brenner, Phys. Rev. Lett., 63 (1989) 302; Phys. Rev. B, 47 (1993) 4464.
    • (1993) Phys. Rev. B , vol.47 , pp. 4464
  • 39
    • 0000942091 scopus 로고
    • J. Tersoff and E. Pehlke, Phys. Rev. Lett., 68 (1992) 816; J. Tersoff, A.W. Denier van der Gon and R.M. Tromp, Phys. Rev. Lett., 70 (1993) 1143; J. Tersoff and R.M. Tromp, Phys. Rev. Lett., 70 (1993) 2782.
    • (1992) Phys. Rev. Lett. , vol.68 , pp. 816
    • Tersoff, J.1    Pehlke, E.2
  • 41
    • 0346152016 scopus 로고
    • J. Tersoff and E. Pehlke, Phys. Rev. Lett., 68 (1992) 816; J. Tersoff, A.W. Denier van der Gon and R.M. Tromp, Phys. Rev. Lett., 70 (1993) 1143; J. Tersoff and R.M. Tromp, Phys. Rev. Lett., 70 (1993) 2782.
    • (1993) Phys. Rev. Lett. , vol.70 , pp. 2782
    • Tersoff, J.1    Tromp, R.M.2
  • 46
    • 11644283926 scopus 로고
    • K. Takayangi, Y. Tanishiro, M. Takahashi and S. Takahashi, J. Vac. Sci. Technol., A3 (1985) 1502; Surf. Sci., 164 (1985) 367.
    • (1985) Surf. Sci. , vol.164 , pp. 367
  • 47
    • 84914188028 scopus 로고
    • J.N. Sherwood, A.V. Chadwick, W.M. Muir and F.L. Swinton (eds.), Gordon and Breach, London
    • A.D. LeClaire, in J.N. Sherwood, A.V. Chadwick, W.M. Muir and F.L. Swinton (eds.), Diffusion Processes, Gordon and Breach, London, 1971.
    • (1971) Diffusion Processes
    • LeClaire, A.D.1
  • 49
    • 3343009123 scopus 로고
    • For an application of this formalism to the exchange of atoms in bulk Si, see K.C. Pandey and E. Kaxiras, Phys. Rev. Lett., 66 (1991) 915; E. Kaxiras and K.C. Pandey, Phys. Rev. B, 47 (1993) 1659.
    • (1991) Phys. Rev. Lett. , vol.66 , pp. 915
    • Pandey, K.C.1    Kaxiras, E.2
  • 50
    • 0000143712 scopus 로고
    • For an application of this formalism to the exchange of atoms in bulk Si, see K.C. Pandey and E. Kaxiras, Phys. Rev. Lett., 66 (1991) 915; E. Kaxiras and K.C. Pandey, Phys. Rev. B, 47 (1993) 1659.
    • (1993) Phys. Rev. B , vol.47 , pp. 1659
    • Kaxiras, E.1    Pandey, K.C.2
  • 65
    • 0000098667 scopus 로고
    • D.B. Yu and A. Oshiyama, Phys. Rev. Lett., 71 (1993) 585; B.D. Yu and A. Oshiyama, Phys. Rev. Lett., 72 (1994) 3190.
    • (1993) Phys. Rev. Lett. , vol.71 , pp. 585
    • Yu, D.B.1    Oshiyama, A.2
  • 66
    • 3342973211 scopus 로고
    • D.B. Yu and A. Oshiyama, Phys. Rev. Lett., 71 (1993) 585; B.D. Yu and A. Oshiyama, Phys. Rev. Lett., 72 (1994) 3190.
    • (1994) Phys. Rev. Lett. , vol.72 , pp. 3190
    • Yu, B.D.1    Oshiyama, A.2
  • 76
    • 0009586444 scopus 로고
    • C. Ratsch and A. Zangwill, Appl. Phys. Lett., 63 (1993) 2348; C. Ratsch and Z. Zangwill, Surf. Sci., 293 (1993) 123; A.A. Wheeler, C. Ratsch, A. Morales, H.M. Cox, A. Zangwill, Phys. Rev. B, 46 (1992) 2428; C. Ratsch and A. Zangwill, Appl. Phys. Lett., 58 (1991) 403.
    • (1993) Appl. Phys. Lett. , vol.63 , pp. 2348
    • Ratsch, C.1    Zangwill, A.2
  • 77
    • 0027642035 scopus 로고
    • C. Ratsch and A. Zangwill, Appl. Phys. Lett., 63 (1993) 2348; C. Ratsch and Z. Zangwill, Surf. Sci., 293 (1993) 123; A.A. Wheeler, C. Ratsch, A. Morales, H.M. Cox, A. Zangwill, Phys. Rev. B, 46 (1992) 2428; C. Ratsch and A. Zangwill, Appl. Phys. Lett., 58 (1991) 403.
    • (1993) Surf. Sci. , vol.293 , pp. 123
    • Ratsch, C.1    Zangwill, Z.2
  • 78
    • 0039950323 scopus 로고
    • C. Ratsch and A. Zangwill, Appl. Phys. Lett., 63 (1993) 2348; C. Ratsch and Z. Zangwill, Surf. Sci., 293 (1993) 123; A.A. Wheeler, C. Ratsch, A. Morales, H.M. Cox, A. Zangwill, Phys. Rev. B, 46 (1992) 2428; C. Ratsch and A. Zangwill, Appl. Phys. Lett., 58 (1991) 403.
    • (1992) Phys. Rev. B , vol.46 , pp. 2428
    • Wheeler, A.A.1    Ratsch, C.2    Morales, A.3    Cox, H.M.4    Zangwill, A.5
  • 79
    • 0343234517 scopus 로고
    • C. Ratsch and A. Zangwill, Appl. Phys. Lett., 63 (1993) 2348; C. Ratsch and Z. Zangwill, Surf. Sci., 293 (1993) 123; A.A. Wheeler, C. Ratsch, A. Morales, H.M. Cox, A. Zangwill, Phys. Rev. B, 46 (1992) 2428; C. Ratsch and A. Zangwill, Appl. Phys. Lett., 58 (1991) 403.
    • (1991) Appl. Phys. Lett. , vol.58 , pp. 403
    • Ratsch, C.1    Zangwill, A.2


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