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Volumn 19, Issue 1, 1996, Pages
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Yield analysis software solutions
a
a
NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ARRAYS;
COMPUTER HARDWARE;
DATA REDUCTION;
DATABASE SYSTEMS;
DEFECTS;
EVALUATION;
INSPECTION;
INTEGRATED CIRCUIT MANUFACTURE;
PROCESS ENGINEERING;
SCANNING ELECTRON MICROSCOPY;
SEMICONDUCTOR MATERIALS;
STATISTICAL METHODS;
DEFECT EVALUATION SYSTEM;
FOCUSED ION BEAM TOOLS;
MULTIVENDOR AUTOMATIC DEFECT INSPECTION EQUIPMENT;
OPTICAL DEFECT REVIEW STATIONS;
PROCESS ENGINEERS;
SOFTWARE PRODUCTS;
WAFER FAB;
YIELD ANALYSIS;
COMPUTER SOFTWARE;
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EID: 0029755382
PISSN: 01633767
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (1)
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References (2)
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