X-ray lithography for microelectronics

Physica Scripta T

Volumn 61, Issue , 1996, Pages 26-31

  Smith, Henry I ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS; INTEGRATED CIRCUIT MANUFACTURE; IONS; MASKS; MICROELECTRONICS; MOSFET DEVICES; OPTOELECTRONIC DEVICES; PHOTORESISTS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; ULSI CIRCUITS; X RAYS;

QUANTUM EFFECT DEVICES; SINGLE ELECTRON TRANSISTORS; X RAY PROJECTION;

X RAY LITHOGRAPHY;

EID: 0029754272     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1088/0031-8949/1996/t61/004     Document Type: Article

References (29)

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