Deposition of transparent and elastic hard coating from a far cold remote nitrogen plasma

Vide: Science, Technique et Applications

Volumn , Issue , 1996, Pages 22-23

  Baclez, E ^a   Mutel, B ^a   Dessaux, O ^a   Goudmand, P ^a  

^a UNIV LILLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELASTIC MODULI; ELASTICITY; FILM GROWTH; FOURIER TRANSFORM INFRARED SPECTROSCOPY; HARD FACING; MORPHOLOGY; PLASMAS; REACTION KINETICS; SCANNING ELECTRON MICROSCOPY; SILANES; WEAR OF MATERIALS;

CHEMICAL COMPOSITION; COLD REMOTE NITROGEN PLASMA; ELASTIC HARD COATING; FILM MORPHOLOGY; TABER ABRASION; VICKERS HARDNESS;

COATINGS;

EID: 0029753533     PISSN: 12660167     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)