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Volumn 22, Issue 1, 1996, Pages 1-5
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Characterisation of a saddle field source for deposition of diamond-like carbon films
a d b c c
d
NONE
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Author keywords
[No Author keywords available]
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Indexed keywords
ACETYLENE;
CARBON;
CATHODES;
COATINGS;
DIAMOND DEPOSITS;
DISSOCIATION;
ELECTRODEPOSITION;
INSULATING MATERIALS;
ION BEAMS;
IONIZATION;
SURFACE PHENOMENA;
SADDLE FIELD SOURCE;
DIAMOND FILMS;
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EID: 0029753417
PISSN: 02728842
EISSN: None
Source Type: Journal
DOI: 10.1016/0272-8842(95)00020-8 Document Type: Article |
Times cited : (5)
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References (16)
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