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Volumn 22, Issue 1, 1996, Pages 1-5

Characterisation of a saddle field source for deposition of diamond-like carbon films

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; CARBON; CATHODES; COATINGS; DIAMOND DEPOSITS; DISSOCIATION; ELECTRODEPOSITION; INSULATING MATERIALS; ION BEAMS; IONIZATION; SURFACE PHENOMENA;

EID: 0029753417     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/0272-8842(95)00020-8     Document Type: Article
Times cited : (5)

References (16)
  • 1
    • 85029973738 scopus 로고    scopus 로고
    • 1965 British Patent No. 20592/65
    • MCILRAITH . A. H., 1965 British Patent No. 20592/65.
    • Mcilraith, A.H.1
  • 6
    • 85029990985 scopus 로고    scopus 로고
    • 1973 British Patent No. 44718/73
    • FRANKS, J., 1973 British Patent No. 44718/73.
    • Franks, J.1
  • 8
    • 0020495859 scopus 로고
    • FRANKS, J., Vacuum, 34 (1984) 259-61.
    • (1984) Vacuum , vol.34 , pp. 259-261
    • Franks, J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.