Radiation doping methods of semiconductor materials: The nuclear doping by charged particles

Radiation Effects and Defects in Solids

Volumn 138, Issue 1-2, 1996, Pages 75-101

  Kozlovskii, Vitali V ^a   Zakharenkov, Leonid F ^a  

^a PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHARGED PARTICLES; FERROELECTRIC MATERIALS; IMPURITIES; NUCLEAR PHYSICS; RADIATION EFFECTS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR MATERIALS; SUPERCONDUCTING MATERIALS;

COULOMB REPULSION; DOPANTS; NUCLEAR REACTIONS; NUCLEAR TRANSMUTATION DOPING;

SEMICONDUCTOR DOPING;

EID: 0029753149     PISSN: 10420150     EISSN: None     Source Type: Journal    
DOI: 10.1080/10420159608211511     Document Type: Article

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